Low trap states in in situ SiNx/AlN/GaN metal-insulator-semiconductor structures grown by metal-organic chemical vapor deposition

Applied Physics Letters

Volumn 105, Issue 10, 2014, Pages

  Lu, Xing ^a   Ma, Jun ^a   Jiang, Huaxing ^a   Liu, Chao ^a   Lau, Kei May ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

METAL INSULATOR SEMICONDUCTOR STRUCTURES; METAL-ORGANIC; TRAP STATE;

EID: 84907103965     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4895677     Document Type: Article

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