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Physics Procedia

Volumn 32, Issue , 2012, Pages 347-355

Characterization of Semiconductor Surface Conductivity by Using Microscopic Four-Point Probe Technique

(3) Li, J C a Wang, Y a Ba, D C a

a NORTHEASTERN UNIVERSITY (China)

Author keywords

Focused ion beam deposition; Microscopic four point probes; probe fabrication; surface conductivity

Indexed keywords

EID: 84905582085 PISSN: 18753884 EISSN: 18753892 Source Type: Conference Proceeding
DOI: 10.1016/j.phpro.2012.03.568 Document Type: Conference Paper

Times cited : (55)

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