SCOPUS 정보 검색 플랫폼

Volumn 93, Issue 9, 2008, Pages

A complementary metal-oxide-semiconductor compatible monocantilever 12-point probe for conductivity measurements on the nanoscale

(8) Gammelgaard, L a Boggild P a Wells, J W b Handrup, K b Hofmann, Ph b Balslev, M B c Hansen, J E c Petersen, P R E c

a TECHNICAL UNIVERSITY OF DENMARK (Denmark)

b AARHUS UNIVERSITY (Denmark)

c Capres AS (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; RUTHENIUM; SEMICONDUCTOR MATERIALS; SILICON; SILICON WAFERS; TIN; TITANIUM; TITANIUM COMPOUNDS; TITANIUM OXIDES; TRANSPORT PROPERTIES; TUNGSTEN;

COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FOUR-POINT PROBES; NANO SCALING;

SEMICONDUCTING SILICON;

EID: 51349131389 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2888746 Document Type: Article

Times cited : (18)

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