Micro-four-point probes in a UHV scanning electron microscope for in-situ surface-conductivity measurements

Surface Review and Letters

Volumn 7, Issue 5-6, 2000, Pages 533-537

  Shiraki, Ichiro ^a   Nagao, Tadaaki ^a,b   Hasegawa, Shuji ^a,b   Petersen, Christian L ^c   Bøggild, Peter ^c   Hansen, Torben M ^c   Hansen, François ^c  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CONFERENCE PAPER; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ELECTRON DIFFRACTION; PIEZOELECTRICITY; SCANNING ELECTRON MICROSCOPE; SURFACE PROPERTY; VACUUM;

EID: 0034480597     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0218-625X(00)00059-2     Document Type: Conference Paper

References (8)