Accurate microfour-point probe sheet resistance measurements on small samples

Review of Scientific Instruments

Volumn 80, Issue 5, 2009, Pages

  Thorsteinsson, Sune ^a   Wang, Fei ^b   Petersen, Dirch H ^a,b   Hansen, Torben Mikael ^b   Kjr, Daniel ^a   Lin, Rong ^a   Kim, Jang Yong ^b   Nielsen, Peter F ^a   Hansen, Ole ^b  

^a Capres AS   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT ACCURACY; CORRECTION FACTORS; MICRO-FOUR-POINT PROBES; MIRROR PLANE; SHEET RESISTANCE MEASUREMENTS; SMALL SAMPLES; SWEET SPOT;

ELECTRIC RESISTANCE; SHEET RESISTANCE;

PROBES;

EID: 66549086651     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3125050     Document Type: Article

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