SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 7 B, 2003, Pages 4856-4860

Nano-four-point probes on microcantilever system fabricated by focused ion beam

(4) Nagase, Masao a Takahashi, Hiroshi b Shirakawabe, Yoshiharu b Namatsu, Hideo a

a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories (Japan)

b SEIKO INSTRUMENTS INC (Japan)

Author keywords

Cantilever; Focused ion beam; Four point probes; Nanotechnology; Resistivity measurement; Scanning probe microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRODES; GRAPHITE; ION BEAMS; MICROMACHINING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; REACTIVE ION ETCHING; RESISTORS; SILICON ON INSULATOR TECHNOLOGY; SURFACE TOPOGRAPHY;

FOCUSED ION BEAM; MICROCANTILEVER SYSTEM; NANO FOUR POINT PROBES; PIEZORESISTORS; SCANNING PROBE MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 0141680590 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.4856 Document Type: Article

Times cited : (27)

References (10)

1
- 34848919386
- G. Binnig, H. Rohrer, Ch. Gerber and E. Weibel: Phys. Rev. Lett. 49 (1982) 57.
- (1982) Phys. Rev. Lett. , vol.49 , pp. 57
- Binnig, G.¹ Rohrer, H.² Gerber, Ch.³ Weibel, E.⁴

2
- 0012618901
- G. Binnig, C. F. Quate and Ch. Gerver: Phys. Rev. Lett. 56 (1986) 930.
- (1986) Phys. Rev. Lett. , vol.56 , pp. 930
- Binnig, G.¹ Quate, C.F.² Gerver, Ch.³

3
- 0038488842
- C. L. Petersen, F. Grey, I. Shiraki and S. Hasegawa: Appl. Phys. Lett. 77 (2000) 3782.
- (2000) Appl. Phys. Lett. , vol.77 , pp. 3782
- Petersen, C.L.¹ Grey, F.² Shiraki, I.³ Hasegawa, S.⁴

4
- 0041681696
- P. Bøggild, T. M. Hansen, O. Kuhn, F. Grey, T. Junno and L. Montelius. Rev. Sci. Instrum. 71 (2000) 2781.
- (2000) Rev. Sci. Instrum. , vol.71 , pp. 2781
- Bøggild, P.¹ Hansen, T.M.² Kuhn, O.³ Grey, F.⁴ Junno, T.⁵ Montelius, L.⁶

5
- 0036324577
- H. Takahashi, K. Ando and Y. Shirakawabe: Ultramicroscopy 91 (2002) 63.
- (2002) Ultramicroscopy , vol.91 , pp. 63
- Takahashi, H.¹ Ando, K.² Shirakawabe, Y.³

6
- 0033724553
- (IEEE, Miyazaki, Japan)
- M. Despont, H. Takahashi, S. Ichihara, Y. Shirakawabe, N. Shimizu, A. Inoue, W. Haeberle, G. Binnig and P. Vettiger: Proc. IEEE Micro Electro Mechanical Systems 2000 (IEEE, Miyazaki, Japan, 2000) p. 126.
- (2000) Proc. IEEE Micro Electro Mechanical Systems 2000 , pp. 126
- Despont, M.¹ Takahashi, H.² Ichihara, S.³ Shirakawabe, Y.⁴ Shimizu, N.⁵ Inoue, A.⁶ Haeberle, W.⁷ Binnig, G.⁸ Vettiger, P.⁹

7
- 0024770949
- S. Akamine, T. Alabrecht, M. Zdeblick and C. F. Quate: IEEE Electron Device Lett. EDL-10 (1989) 490.
- (1989) IEEE Electron Device Lett. , vol.EDL-10 , pp. 490
- Akamine, S.¹ Alabrecht, T.² Zdeblick, M.³ Quate, C.F.⁴

8
- 0000098326
- F. Giessibl and B. Trafas: Rev. Sci. Instrum. 65 (1994) 1923.
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 1923
- Giessibl, F.¹ Trafas, B.²

9
- 0001453196
- N. Blanc, J. Brugger, N. F. de Rooij and U. Dürig: J. Vac. Sci. & Technol. B 14 (1996) 901.
- (1996) J. Vac. Sci. & Technol. B , vol.14 , pp. 901
- Blanc, N.¹ Brugger, J.² De Rooij, N.F.³ Dürig, U.⁴

10
- 0031275481
- C. H. Chen, Z. Trajanovic, Z. W. Dong, C. J. Lobb, T. Venkatesan, K. Edinger, J. Orloff and J. Melngailis: J. Vac. Sci. & Technol. B 15 (1997) 2379.
- (1997) J. Vac. Sci. & Technol. B , vol.15 , pp. 2379
- Chen, C.H.¹ Trajanovic, Z.² Dong, Z.W.³ Lobb, C.J.⁴ Venkatesan, T.⁵ Edinger, K.⁶ Orloff, J.⁷ Melngailis, J.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.