Fabrication of a microscopic four-point probe and its application to local conductivity measurement

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2277-2281

  Ju, Bing Feng ^a   Ju, Yang ^a   Saka, Masumi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; PHOTOLITHOGRAPHY; SILICON NITRIDE; SURFACE TOPOGRAPHY; THIN FILMS;

ELECTRICAL POTENTIAL DROP; INDIUM TIN OXIDE (ITO);

ELECTRIC CONDUCTIVITY MEASUREMENT;

EID: 27944502013     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/009     Document Type: Article

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