Static contact micro four-point probes with <11 nm positioning repeatability

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1092-1095

  Petersen, Dirch H ^a,b   Hansen, Ole ^a   Hansen, Torben M ^a,b   Petersen, Peter R E ^b   Bøggild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Capres AS   (Denmark)

Author keywords

Micro four point probe; Sheet resistance; Static contact; Tribology; Wear

Indexed keywords

ELECTRODES; OPTICAL RESOLVING POWER; STATISTICAL METHODS; SURFACE PROPERTIES; THIN FILMS; WEAR OF MATERIALS;

CANTILEVER TIPS; MICRO FOUR-POINT PROBES (M4PP); SURFACE SENSITIVITY;

MICROELECTRONICS;

EID: 44349129802     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.077     Document Type: Article

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