Fundamental size limitations of micro four-point probes

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 987-990

  Ansbæk, Thor ^a   Petersen, Dirch H ^a,b   Hansen, Ole ^a   Larsen, Jakob B ^a   Hansen, Torben M ^a   Bøggild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Capres AS   (Denmark)

Author keywords

Four point probes; MEMS; NEMS; Sheet resistance; Surface conductivity

Indexed keywords

COMPREHENSIVE STUDIES; DOWN-SCALING; ELECTRICAL EFFECTS; FOUR-POINT PROBES; FUNDAMENTAL LIMITATIONS; HARD DISCS; MAGNETIC TUNNEL JUNCTIONS; MATERIAL STRENGTHS; MICRO-FOUR-POINT PROBES; READ HEADS; STATE-OF-THE ARTS; SURFACE CONDUCTIVITY;

DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; INTEGRATED CIRCUITS; MAGNETIC DEVICES; MAGNETIC HEADS; MEMS; MICROELECTROMECHANICAL DEVICES; PACKET NETWORKS; SEMICONDUCTOR JUNCTIONS; SHEET RESISTANCE; SURFACE RESISTANCE; TUNNEL JUNCTIONS; WAVEGUIDE JUNCTIONS;

PROBES;

EID: 67349268942     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.029     Document Type: Article

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