Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 362-367

  Petersen, Dirch Hjorth ^a,b   Lin, Rong ^b   Hansen, Torben Mikael ^a,b   Rosseel, Erik ^c   Vandervorst, Wilfried ^c,d   Markvardsen, Christian ^b   Kjœr, Daniel ^b   Nielsen, Peter Folmer ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Capres AS   (Denmark)

^c IMEC   (Belgium)

^d UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LASER APPLICATIONS; MICROFABRICATION; SEMICONDUCTOR JUNCTIONS;

FOUR-POINT PROBE; LASER ANNEALING; STITCHING EFFECTS; ULTRA-SHALLOW JUNCTIONS;

SHEET RESISTANCE;

EID: 38849199342     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794743     Document Type: Article

References (14)

1. International Technology Roadmap for Semiconductors (ITRS), Front End Processes (http://www.itrs.net).
2. T. Clarysse, MRS Spring Meeting, San Francisco, US, 2006 (Materials Research Society, Warrendale, 2006), p. 197.
3. C. L. Petersen, T. M. Hansen, P. Boggild, A. Boisen, O. Hansen, T. Hassenkam, and F. Grey, Sens. Actuators, A SAAPEB 0924-4247 10.1016/S0924- 4247(01)00765-8 96, 53 (2002).
4. http://www.capres.com
5. D. H. Petersen, O. Hansen, T. M. Hansen, P. R. E. Petersen, and P. Boggild, 33rd International Conference on Micro- and Nano-Engineering 2007, Copenhagen, Denmark, p. 409.
6. F. M. Smits, Bell Syst. Tech. J. BSTJAN 0005-8580 37, 711 (1958).
7. L. J. van der Pauw, Philips Res. Rep. PRREA9 0031-7918 13, 1 (1958).
8. R. Rymaszew, J. Phys. E: J. Sci. Instrum. ZZZZZZ 0950-1290 2, 170 (1969).
9. T. M. Hansen, D. H. Petersen, R. Lin, D. Kjr, and P. F. Nilsen (unpublished).
10. L. K. J. Vandamme and W. M. G. van Bokhoven, Appl. Phys. APHYCC 0340-3793 10.1007/BF00883091 14, 205 (1977).
11. L. K. J. Vandamme and G. Leroy, Fluct. Noise Lett. ZZZZZZ 0219-4775 6, L161 (2006).
12. D. W. Koon and C. J. Knickerbocker, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1142958 63, 207 (1992).
13. D. W. Koon (private communication).
14. T. M. Hansen, K. Stokbro, O. Hansen, T. Hassenkam, I. Shiraki, S. Hasegawa, and P. Boggild, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1589161 74, 3701 (2003).