Micromachined one-port aluminum nitride lamb wave resonators utilizing the lowest-order symmetric mode

Journal of Microelectromechanical Systems

Volumn 23, Issue 1, 2014, Pages 78-91

  Lin, Chih Ming ^a,b   Yantchev, Ventsislav ^c   Zou, Jie ^a   Chen, Yung Yu ^d   Pisano, Albert P ^a,e  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b SILICON LABORATORIES   (United States)

^c UPPSALA UNIVERSITY   (Sweden)

^d TATUNG UNIVERSITY   (Taiwan)

^e UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride (AlN); electrically floating bottom electrode; high quality factor (Q); Lamb wave resonators; lowest order symmetric (S0) mode; micromechanical resonators; piezoelectric resonators; RF MEMS

Indexed keywords

EID: 84894052043     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2013.2290793     Document Type: Article

References (46)

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