GHz contour extensional mode aluminum nitride MEMS resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 2401-2404

  Stephanou, P J ^a,b   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Harmonic Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; CONTOUR EXTENSIONAL; CONTOUR MODE; ELECTRICAL EXCITATION; ELECTRICAL RESPONSE; HIGHER ORDER; MEMS RESONATORS; MOTIONAL RESISTANCE; OPERATING FREQUENCY; Q-FACTORS; RESONANT FREQUENCIES; SIGNAL ELECTRODE; WAVE FORMS; WIDE FREQUENCY RANGE;

MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NITRIDES; RESONATORS;

ALUMINUM NITRIDE;

EID: 78649352796     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.581     Document Type: Conference Paper

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