Micromachined thin film plate acoustic wave resonators (FPAR): Part II

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 56, Issue 12, 2009, Pages 2701-2710

  Yantchev, Ventsislav ^a   Arapan, Lilia ^a   Katardjiev, Ilia ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; COUPLING OF MODES; DESIGN PARAMETERS; DIFFERENT FREQUENCY; EXPERIMENTAL FREQUENCIES; EXPERIMENTAL STUDIES; FREQUENCY SPECTRA; LOW LOSS; MICROMACHINED; PHYSICAL PARAMETERS; PLATE ACOUSTIC WAVES; Q-FACTORS; Q-VALUES; STOPBAND; SYMMETRIC LAMB WAVES; TEMPERATURE COEFFICIENT;

ACOUSTIC WAVES; ACOUSTICS; PLATES (STRUCTURAL COMPONENTS); RESONATORS; SPECTROSCOPY; THIN FILM DEVICES;

ACOUSTIC RESONATORS;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; COMPUTER AIDED DESIGN; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ACOUSTICS; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MEMBRANES, ARTIFICIAL; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS;

EID: 73649129251     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2009.1361     Document Type: Article

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