Guided lamb wave electroacoustic devices on micromachined AlN/Al plates

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 5, 2010, Pages 1175-1182

  Di Pietrantonio, Fabio ^a   Benetti, Massimiliano ^a   Cannatà, Domenico ^a   Beccherelli, Romeo ^b   Verona, Enrico ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN THIN FILMS; ANISOTROPIC REACTIVE ION ETCHING; DEGREE OF ORIENTATION; DELAY LINE; DISPERSION PHASE; ELECTRO-ACOUSTIC DEVICES; ELECTROMECHANICAL COUPLING COEFFICIENTS; EXPERIMENTAL DATA; GUIDED LAMB WAVES; LAMB MODES; LAMB WAVE; MATRIX METHODS; MICRO DEVICES; MICROMACHINED; PLATE SURFACES; ROCKING CURVES; SENSING DEVICES; SIGNAL PROCESSING SYSTEMS; SIMULATION RESULT; SINGLE CHIPS; SPUTTERING TECHNIQUES; UNDERLAYERS; VELOCITY CURVES;

ACOUSTIC WAVE PROPAGATION; CURVE FITTING; DATA FLOW ANALYSIS; ELASTIC WAVES; ELECTROMECHANICAL DEVICES; FINITE ELEMENT METHOD; REACTIVE ION ETCHING; SENSORS; SIGNAL PROCESSING; ULTRASONIC WAVES;

PLATES (STRUCTURAL COMPONENTS);

EID: 77951885267     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1530     Document Type: Article

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