A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 3, 2009, Pages

  Wingqvist, G ^a   Arapan, L ^a   Yantchev, V ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; ALUMINUM COMPOUNDS; NITRIDES; Q FACTOR MEASUREMENT; RESONATORS; TEMPERATURE DISTRIBUTION; THIN FILM DEVICES; THIN FILMS; ULTRASONIC WAVES; WAVE PROPAGATION;

900 MHZ; ALN FILMS; ALUMINIUM NITRIDES; DESIGN FLEXIBILITIES; DEVICE OPTIMIZATIONS; DEVICE PERFORMANCE; FREQUENCY CONTROLS; LAMB WAVE RESONATORS; MICROMACHINED; MOTIONAL RESISTANCES; PLATE ACOUSTIC WAVES; Q FACTORS; SENSING APPLICATIONS; SYMMETRIC LAMB WAVES; TEMPERATURE COMPENSATIONS; ZERO TEMPERATURE COEFFICIENTS;

ELECTROMECHANICAL DEVICES;

EID: 61849104976     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/3/035018     Document Type: Article

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