Theoretical investigation of Lamb wave characteristics in AlN/3C-SiC composite membranes

Applied Physics Letters

Volumn 97, Issue 19, 2010, Pages

  Lin, Chih Ming ^a,b   Chen, Yung Yu ^c   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c TATUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC LOSS; ACOUSTIC VELOCITY; ALN; CUBIC SILICON CARBIDE (3C-SIC); ELECTROMECHANICAL COUPLING COEFFICIENTS; HIGH FREQUENCY; HIGH QUALITY FACTORS; LAMB WAVE; LAMB WAVE DEVICES; LAMB-WAVE PROPAGATION; MULTI-LAYERED; SYMMETRIC MODE; THEORETICAL CALCULATIONS; THEORETICAL INVESTIGATIONS;

ALUMINUM NITRIDE; COMPOSITE MEMBRANES; ELASTIC WAVES; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; EPITAXIAL GROWTH; NITRIDES; SILICON CARBIDE; ULTRASONIC WAVES; WAVE PROPAGATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 78249256358     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3511471     Document Type: Article

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