Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications

Applied Physics Letters

Volumn 97, Issue 8, 2010, Pages

  Lin, Chih Ming ^a,b   Yen, Ting Ta ^a,b   Felmetsger, Valery V ^c   Hopcroft, Matthew A ^b,d   Kuypers, Jan H ^b   Pisano, Albert P ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c OEM Group Incorporated   (United States)

^d HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; FREQUENCY CONTROL; HIGH TEMPERATURE; LAMB WAVE RESONATORS; SENSING APPLICATIONS; SILICON DIOXIDE; TEMPERATURE COMPENSATION; TURNOVER TEMPERATURES; WELL TEMPERATURE;

ALUMINUM; ELASTIC WAVES; HIGH TEMPERATURE APPLICATIONS; HIGH TEMPERATURE OPERATIONS; NITRIDES; RESONATORS; SILICA; SILICON OXIDES; ULTRASONIC WAVES; WAVE PROPAGATION;

ALUMINUM NITRIDE;

EID: 77956213581     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3481361     Document Type: Article

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