Designing self-organized nanopatterns on si by ion irradiation and metal co-deposition

Nanotechnology

Volumn 25, Issue 8, 2014, Pages

  Zhang, K ^a   Bobes, O ^a   Hofsass H ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Dots and ripples; Ion erosion; Pattern symmetry; Selforganized; Silicon

Indexed keywords

AUTOCORRELATION ANALYSIS; DOTS AND RIPPLES; GEOMETRICAL ARRANGEMENTS; ION EROSION; NEAR SURFACE REGIONS; PATTERN SYMMETRY; SELFORGANIZED; SYMMETRIC PATTERNS;

ARGON; ATOMIC FORCE MICROSCOPY; DEPOSITION; IRRADIATION; PHASE SEPARATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SUBSTRATES;

IONS;

EID: 84893570038     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/8/085301     Document Type: Article

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