In situ x-ray studies of native and Mo-seeded surface nanostructuring during ion bombardment of Si(100)

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Ozaydin Ince, G ^a,b   Ludwig Jr , K F ^a  

^a Boston University   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION-DRIVEN INSTABILITY; DYNAMIC SCALING; GRAZING INCIDENCE SMALL-ANGLE X-RAY SCATTERING; HIGH TEMPERATURE; IN-SITU; ION IMPACT; MASS REDISTRIBUTION; NANO-STRUCTURING; NANODOTS; NANORIPPLES; OFF-AXIS; PRIMARY EFFECTS; ROOM TEMPERATURE; SHORT WAVELENGTHS; SI SURFACES; SI(1 0 0); SI(100) SURFACE; SUBSTRATE TEMPERATURE; SURFACE CORRUGATIONS; SURFACE NANOSTRUCTURING; SURFACE SMOOTHING; THEORETICAL PREDICTION; X-RAY STUDIES;

ATOMIC FORCE MICROSCOPY; ATOMS; CRYSTAL ATOMIC STRUCTURE; GROWTH KINETICS; IONS; MOLYBDENUM; SILICON; STRUCTURAL METALS; SURFACE DIFFUSION; X RAY SCATTERING;

ION BOMBARDMENT;

EID: 66249084901     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224008     Document Type: Article

References (38)

1. Guenterschulze A and Tollmien W V 1942 Z. Phys. 119 685
2. For a recent review, see Chan W L and Chason E 2007 J. Appl. Phys. 101 121301
3. Gago R, Vzquez L, Cueron R, Varela M, Ballesteros C and Albella J M 2001 Appl. Phys. Lett. 78 3316
4. Frost F, Ziberi B, Schindler A and Rauschenbach B 2008 Appl. Phys. A 91 551
5. Fan W, Ling L, Qi L, Li W, Sun H, Gu C, Zhao Y and Lu M 2006 J. Phys.: Condens. Matter 18 3367
6. Ozaydin G, zcan A S, Wang Y, Ludwig K F, Zhao H, Headrick R L and Siddons D P 2005 Appl. Phys. Lett. 87 163104
7. Erlebacher J, Aziz M J, Chason E, Sinclair M B and Floro J A 1990 Phys. Rev. Lett. 82 2330
8. Keller A, Robach S, Facsko S and Möller W 2008 Nanotechnology 19 135303
9. Teichert C, Hofer C and Hlawacek G 2006 Adv. Eng. Mater. 8 1057
10. Snchez-García J A, Vzquez L, Gago R, Redondo-Cubero A, Albella J M and Czigny Zs 2008 Nanotechnology 19 355306
11. Bradley R M and Harper J M E 1988 J. Vac. Sci. Technol. A 6 2390
12. Sigmund P 1973 J. Mater. Sci. 8 1545
13. Habenicht S, Bolse W, Lieb K, Reimann K and Geyer U 1999 Phys. Rev. B 60 R2200
14. Alkemade P 2002 Phys. Rev. Lett. 96 107602
15. Davidovitch B, Aziz M J and Brenner M P 2007 Phys. Rev. B 76 205420
16. Kalyanasundaram N, Ghazisaeidi M, Freund J B and Johnson H T 2008 Appl. Phys. Lett. 92 131909
17. Carter G and Vishnyakov V 1996 Phys. Rev. B 54 17647
18. Moseler M, Gumbsch P, Casiraghi C, Ferrari A C and Robertson J 2005 Science 309 1545
19. Zhou H, Zhou L, Ozaydin G, Ludwig K F Jr and Headrick R L 2008 Phys. Rev. B 78 165404
20. Wehner G K and Hajicek D J 1970 J. Appl. Phys. 42 1145
21. Begrambekov L B, Zakharov A M and Telkovsky V G 1996 Nucl. Instrum. Methods Phys. Res. B 115 456
22. Fujimoto Y, Nozu M and Okuyama F 1995 J. Appl. Phys. 77 2725
23. Ma X L, Shang N G, Li Q, Lee C S, Bello I and Lee S T 2002 J. Cryst. Growth 234 654
24. Meng F Y, Wong W K, Shang N G, Li Q and Bello I 2002 Vacuum 66 71
25. Tanemura M, Yamauchi H, Yamane Y, Okita T and Tanemura S 2004 Nucl. Instrum. Methods Phys. Res. B 215 137
26. Tanemura M, Kobayashi M, Kudo M, Yammauchi H, Okita T, Miao L and Tanemura S 2006 Surf. Sci. 600 3668
27. Ozaydin G, zcan A S, Wang Y, Ludwig K F, Zhou H and Headrick R L 2007 Nucl. Instrum. Methods Phys. Res. B 264 47
28. Ozaydin G, Ludwig K F Jr, Zhou H and Headrick R L 2008 J. Vac. Sci. Technol. B 26 551
29. Sinha S K, Sirota E B, Garoff S and Stanley H B 1998 Phys. Rev. B 38 2297
30. Makeev M A, Cuerno R and Barabsi A-L 2002 Nucl. Instrum. Methods Phys. Res. B 197 185
31. Umbach C C, Headrick R L and Chang K C 2001 Phys. Rev. Lett. 87 246104
32. Makeev M A and Barabasi A-L 1997 Appl. Phys. Lett. 71 2800
33. Ziegler J F and Biersack J P Computer Code SRIM-2008 http://www.srim.org.
34. Ozaydin G, Ludwig K F Jr, Zhou H, Zhou L and Headrick R L 2008 J. Appl. Phys. 103 033512
35. Malis O, Brock J D, Headrick R L, Yi M-S and Pomeroy J M 2002 Phys. Rev. B 66 035408
36. Ziberi B, Frost F, Tartz M, Neumann H and Rauschenbach B 2004 Thin Solid Films 459 106
37. Roy A, Bhattacharjee K, Lenka H P, Mahapatra D P and Dev B N 2008 Nucl. Instrum. Methods Phys. Res. B 266 1276
38. Gago R, Vzquez L, Plantevin O, Snchez-García J A, Varela M, Ballesteros M C, Albella J M and Metzger T H 2006 Phys. Rev. B 73 155414