Highly ordered nanopatterns on Ge and Si surfaces by ion beam sputtering

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Ziberi, B ^a   Cornejo, M ^a   Frost, F ^a   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PARAMETER; BROAD BEAMS; DEGREE OF FREEDOM; DIFFERENT PROCESS; DOT PATTERNS; GE SURFACES; ION-BEAM SPUTTERING; LONG RANGE; LOW ENERGY ION BEAM; LOW-ENERGY ION BEAM EROSION; MATERIAL EROSION; NANO PATTERN; PATTERN FORMATION; ROOM TEMPERATURE; SAMPLE ROTATION; SI SURFACES; SURFACE EROSION;

BEAM PLASMA INTERACTIONS; EROSION; GERMANIUM; ION BEAMS; ION BOMBARDMENT; ION SOURCES; SPUTTERING; SURFACES;

IONS;

EID: 66249133976     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224003     Document Type: Article

References (63)

1. Haymann P 1959 C. R. Acad. Sci. 248 2472
2. Behner H and Wedler G 1985 Surf. Sci. 160 271
3. Carter G, Nobes M J and Whitton J L 1985 Appl. Phys. A 38 77
4. Rusponi S, Boragno C and Valbusa U 1997 Phys. Rev. Lett. 78 2795
5. Murty M V R, Curcic T, Judy A, Cooper B H, Woll A R, Brock J D, Kycia S and Headrick R L 1998 Phys. Rev. Lett. 80 4713
6. van Dijken S, de Bruin D and Poelsema B 2001 Phys. Rev. Lett. 86 4608
7. Malis O, Brock J D, Headrick R L, Yi M S and Pomeroy J M 2002 Phys. Rev. B 66 035408
8. Chan W L, Pavenayotin N and Chason E 2004 Phys. Rev. B 69 245413
9. Carter G, Nobes M J, Paton F, Williams J S and Whitton J L 1977 Radiat. Eff. Defects Solids 33 65
10. MacLaren S W, Baker J E, Finnegan N L and Loxton C M 1992 J. Vac. Sci. Technol. A 10 468
11. Elst K, Vandervorst W, Alay J, Snauwaert J and Hellemans L 1993 J. Vac. Sci. Technol. B 11 1968
12. Malherbe J B 1994 CRC Crit. Rev. Solid State Mater. Sci. 19 55
13. Chason E, Mayer T M, Kellerman B K, McIlroy D T and Howard A J 1994 Phys. Rev. Lett. 72 3040
14. Carter G and Vishnyakov V 1995 Surf. Interface Anal. 23 514
15. Vajo J J, Doty R E and Cirlin E H 1996 J. Vac. Sci. Technol. A 14 2709
16. Vijaya Sankar K, Demanet C M, Malherbe J B, van der Berg N G and Odendaal R Q 1996 Surf. Interface Anal. 24 497
17. Jiang Z X and Alkemade P F A 1998 Appl. Phys. Lett. 73 315
18. Erlebacher J, Aziz M J, Chason E, Sinclair M B and Floro J A 1999 Phys. Rev. Lett. 82 2330
19. Ziberi B, Frost F, Höche Th and Rauschenbach B 2005 Phys. Rev. B 72 235310
20. Mũoz-Garca J, Vzquez L, Cuerno R, Snchez-García J A, Castro M and Gago R 2007 arXiv:0706.2625v1
21. Keller A, Rossbach S, Facsko S and Möller W 2008 Nanotechnology 19 135303
22. Facsko S, Dekorsy T, Koerdt C, Trappe C, Kurz H, Vogt A and Hartnagel H L 1999 Science 285 1551
23. Frost F, Schindler A and Bigl F 2000 Phys. Rev. Lett. 85 4116
24. Gago R, Vazquez L, Cuerno R, Varela M, Ballesteros C and Albella J M 2001 Appl. Phys. Lett. 78 3316
25. Ziberi B, Frost F, Höche T and Rauschenbach B 2005 Appl. Phys. Lett. 87 033113
26. Umbach C C, Headrick R L and Chang K C 2001 Phys. Rev. Lett. 87 246104
27. Habenicht S, Bolse W, Lieb K P, Reimann K and Geyer U 1999 Phys. Rev. B 60 R2200
28. Wu Y-R, Datta A and Wang Y L 2001 Phys. Rev. B 63 125407
29. Frost F, Ziberi B, Höche T and Rauschenbach B 2004 Nucl. Instrum. Methods B 216 9
30. Carter G and Vishnyakov V 1996 Phys. Rev. B 54 17647
31. Chini T K, Sanyal M K and Bhattacharyya S R 2002 Phys. Rev. B 66 153404
32. Hazra S, Chini T K, Sanyal M K, Grenzer J and Pietsch U 2004 Phys. Rev. B 70 121307(R)
33. Gago R, Vzquez L, Plantevin O, Metzger T H, Mũoz-Garcia J, Cuerno R and Castro M 2006 Appl. Phys. Lett. 89 233101
34. Ziberi B, Frost F and Rauschenbach B 2006 Appl. Phys. Lett. 88 173115
35. Carbonne D, Alija A, Plantevin O, Gago R, Facsko S and Metzger T H 2008 Nanotechnology 19 035304
36. Ziberi B, Frost F, Tartz M, Neumann H and Rauschenbach B 2008 Appl. Phys. Lett. 92 063102
37. Ziberi B 2007 Ion Beam Induced Pattern Formation on Si and Ge Surfaces (Leipzig: Engelsdorfer)
38. Tartz M 2003 PhD Thesis University of Leipzig
39. Zhao Y, Wang G-C and Lu T-M 2001 Characterization of Amorphous and Crystalline Rough Surfaces: Principles and Applications (San Diego, CA: Academic)
40. Frost F, Fechner R, Ziberi B, Flamm D and Schindler A 2004 Thin Solid Films 459 100
41. Frost F, Fechner R, Flamm D, Ziberi B, Frank W and Schindler A 2004 Appl. Phys. A 78 651
42. Frost F, Fechner R, Ziberi B, Völlner J and Schindler A 2009 J. Phys.: Condens. Matter 21 224026
43. Carter G, Vishnyakov V, Martynenko Y V and Nobes M J 1995 J. Appl. Phys. 78 3559
44. Biersack J P, Ziegler F and Littmark U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon)
45. Gnaser H 1999 Low-Energy Ion Irradiation of Solid Surfaces (Berlin: Springer)
46. Frost F and Ziberi B 2009 in preparation
47. Bradley R M 1996 Phys. Rev. E 54 6149
48. Makeev M A, Cuerno R and Barabasi A L 2002 Nucl. Instrum. Methods B 197 185
49. Tartz M, Hartmann E, Deltschew R and Neumann H 2002 Rev. Sci. Instrum. 73 928
50. Zeuner M, Neumann H, Scholze F, Flamm F, Tartz M and Bigl F 1998 Plasma Sources Sci. Technol. 7 252
51. Kaufman H R, Cuomo J J and Harper J M E 1982 J. Vac. Sci. Technol. 21 725
52. Kaufman H R and Robinson R S 1982 AIAA J. 20 745
53. Korzec D, Schmitz K and Engemann J 1988 J. Vac. Sci. Technol. B 6 2095
54. Ray M A, Barnett S A and Greene J E 1989 J. Vac. Sci. Technol. A 7 125
55. Becker R and Herrmannsfeldt W B 1992 Rev. Sci. Instrum. 63 2756
56. Ziberi B, Frost F, Tartz M, Neumann H and Rauschenbach B 2004 Thin Solid Films 459 106
57. Fan W, Lin L, Qi L-J, Li W-Q, Sun H-T, Gu Ch, Zhao Y and Lu M 2006 J. Phys.: Condens. Matter 18 3367
58. Gago R, Vazquez L, Cuerno R, Varela M, Ballesteros C and Albella J M 2002 Nanotechnology 13 304
59. Kim J, Cahill D G and Averback R S 2003 Phys. Rev. B 67 045404
60. Ludwig F, Eddy C R, Malis O and Headrick R L 2002 Appl. Phys. Lett. 81 2770
61. Van Nostrand J E, Chey S J and Cahill D G 1998 Phys. Rev. B 57 12536
62. Cuenat A, George H B, Chang K-C, Blakely J M and Aziz M J 2005 Adv. Mater. 17 2845
63. Frost F, Ziberi B, Schindler A and Rauschenbach B 2008 Appl. Phys. A 91 551-9