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Volumn 68, Issue , 2014, Pages 563-572

Evolution of epitaxial graphene layers on 3C SiC/Si (1 1 1) as a function of annealing temperature in UHV

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING TEMPERATURES; ELECTRONIC DEVICE; EPITAXIAL GRAPHENE; EXPONENTIAL DEPENDENCE; GRAPHENE LAYERS; HIGH-TEMPERATURE ANNEALING; RAMAN SPECTROSCOPY MEASUREMENTS; SURFACE CHARACTERIZATION; IN-SITU STUDY;

EID: 84891555108     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2013.11.035     Document Type: Article
Times cited : (73)

References (55)
  • 2
    • 45349092986 scopus 로고    scopus 로고
    • Fine structure constant defines visual transparency of graphene
    • R. Nair, P. Blake, A. Grigorenko, K. Novoselov, T. Booth, and T. Stauber et al. Fine structure constant defines visual transparency of graphene Science 320 2008 1308 1380
    • (2008) Science , vol.320 , pp. 1308-1380
    • Nair, R.1    Blake, P.2    Grigorenko, A.3    Novoselov, K.4    Booth, T.5    Stauber, T.6
  • 4
    • 47749150628 scopus 로고    scopus 로고
    • Measurement of the elastic properties and intrinsic strength of monolayer graphene
    • C. Lee, X. Wei, J.W. Kysar, and J. Hone Measurement of the elastic properties and intrinsic strength of monolayer graphene Science 321 2008 385 388
    • (2008) Science , vol.321 , pp. 385-388
    • Lee, C.1    Wei, X.2    Kysar, J.W.3    Hone, J.4
  • 6
    • 33748296088 scopus 로고    scopus 로고
    • Chiral tunnelling and the Klein paradox in graphene
    • M. Katsnelson, K. Novoselov, and A. Geim Chiral tunnelling and the Klein paradox in graphene Nat Phys 2 2006 620 625
    • (2006) Nat Phys , vol.2 , pp. 620-625
    • Katsnelson, M.1    Novoselov, K.2    Geim, A.3
  • 7
    • 60749107706 scopus 로고    scopus 로고
    • Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition
    • A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, and V. Bulovic et al. Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition Nano Lett 9 2008 30 35
    • (2008) Nano Lett , vol.9 , pp. 30-35
    • Reina, A.1    Jia, X.2    Ho, J.3    Nezich, D.4    Son, H.5    Bulovic, V.6
  • 9
    • 67649225738 scopus 로고    scopus 로고
    • Graphene: Status and prospects
    • A.K. Geim Graphene: status and prospects Science 324 2009 1530 1534
    • (2009) Science , vol.324 , pp. 1530-1534
    • Geim, A.K.1
  • 10
    • 77956149871 scopus 로고    scopus 로고
    • Platinum/graphene nanosheet/SiC contacts and their application for hydrogen gas sensing
    • M. Shafiei, P.G. Spizzirri, R. Arsat, J. Yu, J. du Plessis, and S. Dubin et al. Platinum/graphene nanosheet/SiC contacts and their application for hydrogen gas sensing J Phys Chem C 114 2010 13796 13801
    • (2010) J Phys Chem C , vol.114 , pp. 13796-13801
    • Shafiei, M.1    Spizzirri, P.G.2    Arsat, R.3    Yu, J.4    Du Plessis, J.5    Dubin, S.6
  • 12
    • 80051540489 scopus 로고    scopus 로고
    • Nobel lecture: Graphene: Materials in the Flatland
    • K.S. Novoselov Nobel lecture: graphene: materials in the Flatland Rev Mod Phys 83 2011 837 849
    • (2011) Rev Mod Phys , vol.83 , pp. 837-849
    • Novoselov, K.S.1
  • 15
  • 16
    • 62449331888 scopus 로고    scopus 로고
    • Synthesis, transfer, and devices of single-and few-layer graphene by chemical vapor deposition
    • L.G. De Arco, Y. Zhang, A. Kumar, and C. Zhou Synthesis, transfer, and devices of single-and few-layer graphene by chemical vapor deposition IEEE Trans Nanotechnol 8 2009 135 138
    • (2009) IEEE Trans Nanotechnol , vol.8 , pp. 135-138
    • De Arco, L.G.1    Zhang, Y.2    Kumar, A.3    Zhou, C.4
  • 17
    • 34249742469 scopus 로고    scopus 로고
    • Synthesis of graphene-based nanosheets via chemical reduction of exfoliated graphite oxide
    • S. Stankovich, D.A. Dikin, R.D. Piner, K.A. Kohlhaas, A. Kleinhammes, and Y. Jia et al. Synthesis of graphene-based nanosheets via chemical reduction of exfoliated graphite oxide Carbon 45 2007 1558 1565
    • (2007) Carbon , vol.45 , pp. 1558-1565
    • Stankovich, S.1    Dikin, D.A.2    Piner, R.D.3    Kohlhaas, K.A.4    Kleinhammes, A.5    Jia, Y.6
  • 19
    • 70349529939 scopus 로고    scopus 로고
    • Carbon nanoelectronics: Unzipping tubes into graphene ribbons
    • H. Santos, L. Chico, and L. Brey Carbon nanoelectronics: unzipping tubes into graphene ribbons Phys Rev Lett 103 2009 86801
    • (2009) Phys Rev Lett , vol.103 , pp. 86801
    • Santos, H.1    Chico, L.2    Brey, L.3
  • 20
    • 84864276197 scopus 로고    scopus 로고
    • The physics of epitaxial graphene on SiC (0 0 0 1)
    • H. Kageshima, H. Hibino, and S. Tanabe The physics of epitaxial graphene on SiC (0 0 0 1) J Phys Condens Matter 24 2012 314215
    • (2012) J Phys Condens Matter , vol.24 , pp. 314215
    • Kageshima, H.1    Hibino, H.2    Tanabe, S.3
  • 21
    • 78249233540 scopus 로고    scopus 로고
    • Structural and electronic properties of epitaxial graphene on SiC (0 0 0 1): A review of growth, characterization, transfer doping and hydrogen intercalation
    • C. Riedl, C. Coletti, and U. Starke Structural and electronic properties of epitaxial graphene on SiC (0 0 0 1): a review of growth, characterization, transfer doping and hydrogen intercalation J Phys D Appl Phys 43 2010 374009
    • (2010) J Phys D Appl Phys , vol.43 , pp. 374009
    • Riedl, C.1    Coletti, C.2    Starke, U.3
  • 23
    • 33744469329 scopus 로고    scopus 로고
    • Electronic confinement and coherence in patterned epitaxial graphene
    • C. Berger, Z. Song, X. Li, X. Wu, N. Brown, and C. Naud et al. Electronic confinement and coherence in patterned epitaxial graphene Science 312 2006 1191 1196
    • (2006) Science , vol.312 , pp. 1191-1196
    • Berger, C.1    Song, Z.2    Li, X.3    Wu, X.4    Brown, N.5    Naud, C.6
  • 25
    • 25744467427 scopus 로고
    • LEED and Auger electron observations of the SiC (0 0 0 1) surface
    • A. Van Bommel, J. Crombeen, and A. Van Tooren LEED and Auger electron observations of the SiC (0 0 0 1) surface Surf Sci 48 1975 463 472
    • (1975) Surf Sci , vol.48 , pp. 463-472
    • Van Bommel, A.1    Crombeen, J.2    Van Tooren, A.3
  • 26
    • 77249139286 scopus 로고    scopus 로고
    • Toward ubiquitous environmental gas sensors-capitalizing on the promise of graphene
    • K.R. Ratinac, W. Yang, S.P. Ringer, and F. Braet Toward ubiquitous environmental gas sensors-capitalizing on the promise of graphene Environ Sci Technol 44 2010 1167 1176
    • (2010) Environ Sci Technol , vol.44 , pp. 1167-1176
    • Ratinac, K.R.1    Yang, W.2    Ringer, S.P.3    Braet, F.4
  • 29
    • 84872345925 scopus 로고    scopus 로고
    • Orientation-dependent stress relaxation in hetero-epitaxial 3C-SiC films
    • F. Iacopi, G. Walker, L. Wang, L. Malesys, S. Ma, and B.V. Cunning et al. Orientation-dependent stress relaxation in hetero-epitaxial 3C-SiC films Appl Phys Lett 102 2013 011908 411908
    • (2013) Appl Phys Lett , vol.102 , pp. 011908-411908
    • Iacopi, F.1    Walker, G.2    Wang, L.3    Malesys, L.4    Ma, S.5    Cunning, B.V.6
  • 30
    • 79958242680 scopus 로고    scopus 로고
    • Growth of 3C-SiC on 150 mm Si (1 0 0) substrates by alternating supply epitaxy at 1000 C
    • L. Wang, S. Dimitrijev, J. Han, A. Iacopi, L. Hold, and P. Tanner et al. Growth of 3C-SiC on 150 mm Si (1 0 0) substrates by alternating supply epitaxy at 1000 C Thin Solid Films 519 2011 6443 6446
    • (2011) Thin Solid Films , vol.519 , pp. 6443-6446
    • Wang, L.1    Dimitrijev, S.2    Han, J.3    Iacopi, A.4    Hold, L.5    Tanner, P.6
  • 32
    • 60749097071 scopus 로고    scopus 로고
    • Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide
    • K.V. Emtsev, A. Bostwick, K. Horn, J. Jobst, G.L. Kellogg, and L. Ley et al. Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide Nat Mater 8 2009 203 207
    • (2009) Nat Mater , vol.8 , pp. 203-207
    • Emtsev, K.V.1    Bostwick, A.2    Horn, K.3    Jobst, J.4    Kellogg, G.L.5    Ley, L.6
  • 33
    • 60749125537 scopus 로고    scopus 로고
    • Epitaxial graphene: How silicon leaves the scene
    • P. Sutter Epitaxial graphene: how silicon leaves the scene Nat Mater 8 2009 171 172
    • (2009) Nat Mater , vol.8 , pp. 171-172
    • Sutter, P.1
  • 34
  • 35
    • 79960666911 scopus 로고    scopus 로고
    • Low-energy-electron-diffraction and X-ray-phototelectron-spectroscopy studies of graphitization of 3C-SiC (1 1 1) thin film on Si (1 1 1) substrate
    • R. Takahashi, H. Handa, S. Abe, K. Imaizumi, H. Fukidome, and A. Yoshigoe et al. Low-energy-electron-diffraction and X-ray-phototelectron-spectroscopy studies of graphitization of 3C-SiC (1 1 1) thin film on Si (1 1 1) substrate Jpn J Appl Phys 50 2011 0103
    • (2011) Jpn J Appl Phys , vol.50 , pp. 0103
    • Takahashi, R.1    Handa, H.2    Abe, S.3    Imaizumi, K.4    Fukidome, H.5    Yoshigoe, A.6
  • 37
    • 0030149836 scopus 로고    scopus 로고
    • Atomic structures of 6H SiC (0 0 0 1) and (0 0 0 1) surfaces
    • L. Li, and I. Tsong Atomic structures of 6H SiC (0 0 0 1) and (0 0 0 1) surfaces Surf Sci 351 1996 141 148
    • (1996) Surf Sci , vol.351 , pp. 141-148
    • Li, L.1    Tsong, I.2
  • 38
    • 0002424897 scopus 로고
    • Reduction of SiC surface oxides by a Ga molecular beam: LEED and electron spectroscopy studies
    • R. Kaplan, and T. Parrill Reduction of SiC surface oxides by a Ga molecular beam: LEED and electron spectroscopy studies Surf Sci 165 1986 L45 L52
    • (1986) Surf Sci , vol.165
    • Kaplan, R.1    Parrill, T.2
  • 39
    • 58149147153 scopus 로고    scopus 로고
    • Bottom-up growth of epitaxial graphene on 6H-SiC (0 0 0 1)
    • 2008/12/23
    • H. Huang, W. Chen, S. Chen, and A.T.S. Wee Bottom-up growth of epitaxial graphene on 6H-SiC (0 0 0 1) Acs Nano 2 2008 2513 2518 2008/12/23
    • (2008) Acs Nano , vol.2 , pp. 2513-2518
    • Huang, H.1    Chen, W.2    Chen, S.3    Wee, A.T.S.4
  • 41
    • 84870044392 scopus 로고    scopus 로고
    • STM studies of epitaxial graphene
    • S.L. Wong, H. Huang, W. Chen, and A.T.S. Wee STM studies of epitaxial graphene MRS Bull 37 2012 1195 1202
    • (2012) MRS Bull , vol.37 , pp. 1195-1202
    • Wong, S.L.1    Huang, H.2    Chen, W.3    Wee, A.T.S.4
  • 42
    • 84863888233 scopus 로고    scopus 로고
    • Epitaxial graphene on single domain 3C-SiC (1 0 0) thin films grown on off-axis Si (1 0 0)
    • A. Ouerghi, A. Balan, C. Castelli, M. Picher, R. Belkhou, and M. Eddrief et al. Epitaxial graphene on single domain 3C-SiC (1 0 0) thin films grown on off-axis Si (1 0 0) Appl Phys Lett 101 2012 21603
    • (2012) Appl Phys Lett , vol.101 , pp. 21603
    • Ouerghi, A.1    Balan, A.2    Castelli, C.3    Picher, M.4    Belkhou, R.5    Eddrief, M.6
  • 43
    • 41549157259 scopus 로고    scopus 로고
    • Interaction, growth, and ordering of epitaxial graphene on SiC 0 0 0 1 surfaces: A comparative photoelectron spectroscopy study
    • K. Emtsev, F. Speck, T. Seyller, L. Ley, and J. Riley Interaction, growth, and ordering of epitaxial graphene on SiC 0 0 0 1 surfaces: a comparative photoelectron spectroscopy study Phys Rev B 77 2008 155303
    • (2008) Phys Rev B , vol.77 , pp. 155303
    • Emtsev, K.1    Speck, F.2    Seyller, T.3    Ley, L.4    Riley, J.5
  • 44
    • 84861905732 scopus 로고    scopus 로고
    • STM/STS investigation of edge structure in epitaxial graphene
    • M. Ridene, J. Girard, L. Travers, C. David, and A. Ouerghi STM/STS investigation of edge structure in epitaxial graphene Surf Sci 606 2012 1289 1292
    • (2012) Surf Sci , vol.606 , pp. 1289-1292
    • Ridene, M.1    Girard, J.2    Travers, L.3    David, C.4    Ouerghi, A.5
  • 45
    • 33749126038 scopus 로고    scopus 로고
    • Structural and electronic properties of graphite layers grown on siC (0 0 0 1)
    • T. Seyller Structural and electronic properties of graphite layers grown on siC (0 0 0 1) Surf Sci 600 2006 3906 3911
    • (2006) Surf Sci , vol.600 , pp. 3906-3911
    • Seyller, T.1
  • 46
    • 33748146502 scopus 로고    scopus 로고
    • Synthesis and characterization of atomically thin graphite films on a silicon carbide substrate
    • E. Rollings, G.H. Gweon, S. Zhou, B. Mun, J. McChesney, and B. Hussain et al. Synthesis and characterization of atomically thin graphite films on a silicon carbide substrate J Phys Chem Solids 67 2006 2172 2177
    • (2006) J Phys Chem Solids , vol.67 , pp. 2172-2177
    • Rollings, E.1    Gweon, G.H.2    Zhou, S.3    Mun, B.4    McChesney, J.5    Hussain, B.6
  • 51
    • 71949115543 scopus 로고    scopus 로고
    • Transfer of large-area graphene films for high-performance transparent conductive electrodes
    • X. Li, Y. Zhu, W. Cai, M. Borysiak, B. Han, and D. Chen et al. Transfer of large-area graphene films for high-performance transparent conductive electrodes Nano Lett 9 2009 4359 4363
    • (2009) Nano Lett , vol.9 , pp. 4359-4363
    • Li, X.1    Zhu, Y.2    Cai, W.3    Borysiak, M.4    Han, B.5    Chen, D.6
  • 52
    • 41449092432 scopus 로고    scopus 로고
    • Raman spectroscopy of epitaxial graphene on a SiC substrate
    • Z.H. Ni, W. Chen, X.F. Fan, J.L. Kuo, T. Yu, and A.T.S. Wee et al. Raman spectroscopy of epitaxial graphene on a SiC substrate Phys Rev B 77 2008 115416
    • (2008) Phys Rev B , vol.77 , pp. 115416
    • Ni, Z.H.1    Chen, W.2    Fan, X.F.3    Kuo, J.L.4    Yu, T.5    Wee, A.T.S.6
  • 55
    • 8644229505 scopus 로고
    • Fundamentals, overtones, and combinations in the Raman spectrum of graphite
    • Y. Kawashima, and G. Katagiri Fundamentals, overtones, and combinations in the Raman spectrum of graphite Phys Rev B 52 1995 10053
    • (1995) Phys Rev B , vol.52 , pp. 10053
    • Kawashima, Y.1    Katagiri, G.2


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