Novel approach to thin film polycrystalline silicon on glass

Materials Letters

Volumn 63, Issue 21, 2009, Pages 1817-1819

  Illiberi, A ^a   Sharma, K ^a   Creatore, M ^a   van de Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Expanding thermal plasma; Polycrystalline silicon; Solar energy materials; Solid Phase Crystallization; Thin films

Indexed keywords

A-SI:H; CRYSTAL GRAINS; EXPANDING THERMAL PLASMA; EXPANDING THERMAL PLASMAS; HIGH DEPOSITION RATES; HIGH SUBSTRATE TEMPERATURE; POLY-SI; POLYCRYSTALLINE SILICON; POLYCRYSTALLINE SILICON (POLY-SI); SOLAR ENERGY MATERIALS; SOLID PHASE CRYSTALLIZATION; THIN FILM POLYCRYSTALLINE SILICON; THIN FILM SOLAR CELLS;

CRYSTALLIZATION; GLASS; PLASMA DEPOSITION; PLASMAS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SOLAR ENERGY; SOLAR RADIATION; THIN FILM DEVICES; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 67649338404     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2009.05.044     Document Type: Article

References (24)

1. Green M.A. J Mater Sci Mater Electron, 18 (2007) S15
2. Green M.A., et al. Solar Energy 77 (2004) 857
3. Beaucarne G., et al. Appl Phys A 79 (2004) 469
4. Nast O., et al. Appl Phys Lett 73 (1998) 3214
5. Andra G., et al. 19th European Photovoltaics Solar Energy Conference (2004) 872
6. Widenborg P.I., et al. J Crystal Growth 276 (2005) 19
7. Taretto K., et al. J Appl Phys 93 (2003) 5447
8. Bergmann R.B., and Werner J.H. Thin Solid Films 403 (2002) 162
9. Hatalis M.K., and Greve D.W. J Appl Phys 63 (1988) 2260
10. Kessels W.M.M., et al. J Vac Sci Technol A 18 5 (2000)
11. Yue G., et al. Appl Phys Lett 75 (1999) 492
12. Smets A.H.M., and van de Sanden M.C.M. Phys Rev B 76 (2007) 073202
13. Severens R.J., et al. Appl Phys Lett 67 (1995) 491
14. Campbell I.H. Solid State Comm 58 (1986) 739
15. Masaki Y., et al. J Appl Phys 74 (1993) 129
16. Voutsas A.T., and Hatalis M.K. Appl Phys Lett 63 (1993) 1546
17. Voutsas A.T., and Hatalis M.K. J Appl Phys 76 (1994) 777
18. Malhotra A.K., et al. Appl Phys Lett 28 (1976) 47
19. Stradins P., et al. Mater. Res. Soc. Symp. Proc. Vol. 989 (2007), Materials Research Society 0989
20. Song D., et al. Thin Solid Films 513 (2006) 356
21. Feenstra K.F., et al. J Appl Phys 85 (1999) 6843
22. Stradins P., et al. Appl Phys Lett 89 (2006) 121921
23. Young D., et al. Appl Phys Lett 89 (2006) 161910
24. Kessels W.M.M., et al. J Appl Phys 89 (2001) 2404