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Volumn 11, Issue 4 SUPPL., 2011, Pages
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Synthesis and characterization of ZnO thin films deposited via PE-MOCVD
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Author keywords
Indirect plasma; PE MOCVD; Transparent conduction oxide; ZnO
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Indexed keywords
DIETHYL ZINC;
DIRECT PLASMA;
EXPERIMENTAL CONDITIONS;
INDIRECT PLASMA;
OPTICAL TRANSPARENCY;
PE-MOCVD;
PLANE ORIENTATION;
PLASMA ENHANCEMENT;
PLASMA REGION;
PREFERRED ORIENTATIONS;
QUARTZ GLASS SUBSTRATES;
REACTIVE RADICALS;
SI(1 0 0);
SUBSTRATE TEMPERATURE;
TRANSPARENT CONDUCTION OXIDE;
ZNO;
ZNO FILMS;
ZNO THIN FILM;
ACTIVATION ENERGY;
ARRHENIUS PLOTS;
DEPOSITION;
METALLIC FILMS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
OPTICAL FILMS;
ORGANIC CHEMICALS;
ORGANOMETALLICS;
PLASMAS;
QUARTZ;
SEMICONDUCTING SILICON COMPOUNDS;
SUBSTRATES;
SURFACE REACTIONS;
SYNTHESIS (CHEMICAL);
THIN FILMS;
TRANSPARENCY;
VAPOR DEPOSITION;
ZINC OXIDE;
AMORPHOUS FILMS;
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EID: 80455173979
PISSN: 15671739
EISSN: None
Source Type: Journal
DOI: 10.1016/j.cap.2011.01.049 Document Type: Conference Paper |
Times cited : (13)
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References (12)
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