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Volumn 11, Issue 4 SUPPL., 2011, Pages

Synthesis and characterization of ZnO thin films deposited via PE-MOCVD

Author keywords

Indirect plasma; PE MOCVD; Transparent conduction oxide; ZnO

Indexed keywords

DIETHYL ZINC; DIRECT PLASMA; EXPERIMENTAL CONDITIONS; INDIRECT PLASMA; OPTICAL TRANSPARENCY; PE-MOCVD; PLANE ORIENTATION; PLASMA ENHANCEMENT; PLASMA REGION; PREFERRED ORIENTATIONS; QUARTZ GLASS SUBSTRATES; REACTIVE RADICALS; SI(1 0 0); SUBSTRATE TEMPERATURE; TRANSPARENT CONDUCTION OXIDE; ZNO; ZNO FILMS; ZNO THIN FILM;

EID: 80455173979     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2011.01.049     Document Type: Conference Paper
Times cited : (13)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.