Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure

ECS Journal of Solid State Science and Technology

Volumn 1, Issue 5, 2012, Pages

  Volksen, Willi ^a   Purushothaman, Sampath ^b   Darnon, Maxime ^b   Lofaro, Mike F ^b,c   Cohen, Stephan A ^b   Doyle, James P ^b   Fuller, Nicholas ^b   Magbitang, Teddie P ^b   Rice, Philip M ^a   Krupp, Leslie E ^a   Nakagawa, Hisashi ^d   Nobe, Youhei ^d   Kokubo, Terukazu ^d   Duboisa, Geraud J M ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c CNRS   (France)

^d JSR Tsukuba Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84887431592     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.013205jss     Document Type: Article

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