Glass/SU-8 microchip for electrokinetic applications

Electrophoresis

Volumn 34, Issue 20-21, 2013, Pages 2996-3002

  Lima, Renato Sousa ^a,b,c   Carneiro Leão, Paulo Augusto Gomes ^b,c   Monteiro, Alessandra Maffei ^b,c   de Oliveira Piazzetta, Maria Helena ^a   Gobbi, Angelo Luiz ^a   Mazo, Luiz Henrique ^b   Carrilho, Emanuel ^b,c  

^a BRAZILIAN CENTER FOR RESEARCH IN ENERGY AND MATERIALS CNPEM   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c Instituto Nacional de Ciência e Tecnologia de Bioanalítica INCT Bioanalítica   (Brazil)

Author keywords

Bonding; Microfabrication; Photoresist

Indexed keywords

ELECTRIC FIELDS; ELECTRODYNAMICS; ELECTROOSMOSIS; GLASS BONDING; MICROCHANNELS; MICROPROCESSOR CHIPS; PHOTORESISTS; SUBSTRATES;

BONDING; DISSIPATION CAPACITY; ELECTRIC CHARACTERIZATION; ELECTRO-KINETICS; ELECTROOSMOTIC MOBILITIES; HYBRID GLASS; MICRO-DEVICE; MICRO-FABRICATION; PERFORMANCE; PHOSPHATE BUFFERS;

GLASS;

GLASS; PHOSPHATE;

ARTICLE; ELECTRIC FIELD; ELECTROOSMOSIS; EQUIPMENT DESIGN; FILM; LABORATORY DEVICE; MICROCHIP; MICROELECTROMECHANICAL SYSTEM; MICROTECHNOLOGY; PH;

EID: 84887411677     PISSN: 01730835     EISSN: 15222683     Source Type: Journal    
DOI: 10.1002/elps.201300167     Document Type: Article

References (66)

1. Shang, F., Guihen, E., Glennon, J. D., Electrophoresis 2012, 33, 105-116.
2. Madou, M. J., Fundamentals of Microfabrication and Nanotechnology. Manufacturing Techniques for Microfabrication and Nanotechnology Vol. 2, 3rd Ed., CRC Press, New York 2011.
3. Becker, H., Gärtner, C., Anal. Bioanal. Chem. 2008, 390, 89-111.
4. Xu, X., Zhang, S., Chen, H., Kong, J., Talanta 2009, 80, 8-18.
5. Kuncova-Kallio, J., Kallio, P. J., Conf. Proc. IEEE. Eng. Med. Biol. Soc. 2006, 1, 2486-2489.
6. Toepke, M. W., Beebe, D. J., Lab Chip 2006, 6, 1484-1486.
7. Lee, J. N., Park, C., Whitesides, G. M., Anal. Chem. 2003, 75, 6544-6554.
8. Sikanen, T., Tuomikoski, S., Ketola, R. A., Kostiainen, R., Franssila, S., Kotiaho, T., Lab Chip 2005, 5, 888-896.
9. Sikanen, T., Heikkilä, L., Tuomikoski, S., Ketola, R. A., Kostiainen, R., Franssila, S., Kotiaho, T., Anal. Chem. 2007, 79, 6255-6263.
10. Aracil, C., Perdigones, F., Moreno, J. M., Quero, J. M., J. Micromech. Microeng. 2010, 20, 035008.
11. Salvo, P., Verplancke, R., Bossuyt, F., Latta, D., Vandecasteele, B., Liu, C., Vanfleteren, J., Microfluid. Nanofluid. 2012, 13, 987-991.
12. Zizzari, A., Arima, V., Zacheo, A., Pascali, G., Salvadori, P. A., Perrone, E., Mangiullo, D., Rinaldi, R., Microelectron. Eng. 2011, 88, 1664-1667.
13. Larsen, T., Keller, S., Schmid, S., Dohn, S., Boisen, A., Microelectron. Eng. 2011, 88, 2311-2313.
14. Reddy, C. V. B., Khaderbad, M. A., Gandhi, S., Kandpal, M., Patil, S., Chetty, K. N., Rajulu, K. G., Chary, P. C. K., Ravikanth, M., Rao, V. R., IEEE Trans. Nanotechnol. 2012, 11, 701-706.
15. Kuo, S. M., Huang, Y. W., Yeh, S. M., Lin, C. H., Opt. Express 2011, 19, 18372-18379.
16. Tuyen, L. D., Wu, C. Y., Anh, T. K., Minh, L. Q., Kan, H. C., Hsu, C. C., J. Exp. Nanosci. 2012, 7, 198-204.
17. Kim, K. J., Kima, Y. S., Bae, J. J., Kang, B. H., Yeom, S. H., Yuan, H., Kang, S. W., Exp. Nanosci. 2011, 95, 1238-1242.
18. Esquivel, J. P., Senn, T., Hernández-Fernández, P., Santander, J., Lörgen, M., Rojas, S., Löchel, B., Cané, C., Sabaté, N., J. Power Forces 2010, 195, 8110-8115.
19. Sikanen, T., Tuomikoski, S., Ketola, R. A., Kostiainen, R., Franssila, S., Kotiaho, T., Anal. Chem. 2007, 79, 9135-9144.
20. Nordman, N., Sikanen, T., Moilanen, M. E., Aura, S., Kotiaho, T., Franssila, S., Kostiainen, R., J. Chromatogr. A 2011, 1218, 739-745.
21. Pang, C., Zhao, Z., Li, S., Du, L., Fang, Z., Adv. Mat. Res. 2009, 60-61, 68-73.
22. Xue, N., Chang, S. P., Lee, J. B., J. Micromech. Microeng. 2012, 21, 1338-1346.
23. Altuna, A., de la Prida, L. M., Bellistri, E., Gabriel, G., Guimera, A., Fernandez, L. J., Biosens. Bioelectron. 2012, 37, 1-5.
24. Chao, T. Y., Hsu, M. C., Lin, C. D., Cheng, Y. T., J. Micromech. Microeng. 2011, 21, 025010.
25. Rouabah, H. A., Park, B. Y., Zaouk, R. B., Morgan, H., Madou, M. J., Green, N. G., J. Micromech. Microeng. 2011, 21, 035018.
26. Yang, B., Zhu, Y., Jiao, Y., Yang, L., Sheng, Z., He, S., Dai, D., J. Lightwave Technol. 2011, 29, 2009-2014.
27. Aida, T., Tokuhara, T., Asahi, S., Hiroya, M., Hiroshi, K., Microelectron. Eng. 2012, 98, 258-261.
28. Chang, C. J., Yang, C. S., Chuang, Y. J., Khoo, H. S., Tseng, F. G., Nanotechnology 2008, 19, 365301.
29. Tsai, N. C., Sue, C. Y., Biosens. Bioelectron. 2006, 22, 313-317.
30. El-Ali, J., Perch-Nielsen, I. R., Poulsen, C. R., Bang, D. D., Tefleman, P., Wolff, A., Sens. Actuators A 2004, 110, 3-10.
31. Carlier, J., Arscott, S., Thonny, V., Fourrier, J. C., Caron, F., Camart, J. C., Druon, C., Tabourier, P., J. Micromech. Microeng. 2004, 14, 619-624.
32. LeGac, C., Carlier, J., Camart, J. C., Cren-Olivé, C., Rolando, C., J. Chromatogr. B: Biomed. Appl. 2004, 808, 3-14.
33. Wang, Z., Hansen, O., Petersen, P. K., Rogeberg, A., Kutter, J. P., Bang, D. D., Wolff, A., Electrophoresis 2006, 27, 5081-5092.
34. Castaño-Alvarez, M., Fernández-Abedul, M. T., Costa-García, A., Agirregabiria, M., Fernández, L. J., Ruano-López, J. M., Barredo-Presa, B., Talanta 2009, 80, 24-30.
35. Chang, C. J., Yang, C. S., Lan, L. H., Wang, P. C., Tseng, F. G., J. Micromech. Microeng. 2010, 20, 115031.
36. Shameli, S. M., Elbuken, C., Ou, J., Ren, C. L., Pawliszyn, J., Electrophoresis 2011, 32, 333-339.
37. Abgrall, P., Conedera, V., Camon, H., Gue, A. M., Nguyen, N. T., Electrophoresis 2007, 28, 4539-4551.
38. Tuomikoski, S., Franssila, S., Sens. Actuat. A 2005, 120, 408-415.
39. Agirregabiria, M., Blanco, F. J., Berganzo, J., Arroyo, M. T., Fullaondo, A., Mayora, K., Ruano-López, J. M., Lab Chip 2005, 5, 545-552.
40. Sato, H., Matsumura, H., Keino, S., Shoji, S., J. Micromech. Microeng. 2006, 16, 2318-2322.
41. Fu, C., Hung, C., Huang, H., JPCS 2006, 34, 330-335.
42. Blanco, F. J., Agirregabiria, M., Garcia, J., Berganzo, J., Tijero, M., Arroyo, M. T., Ruano, J. M., Aramburu, I., Mayora, K., J. Micromech. Microeng. 2004, 14, 1047-1056.
43. Steigert, J., Brett, O., Müller, C., Strasser, M., Wangler, N., Reinecke, H., Daub, M., Zengerle, R., J. Micromech. Microeng. 2008, 18, 095013.
44. Mogensen, K. B., Al-Ali, J., Wolff, A., Kutter, J. P., Appl. Opt. 2003, 42, 4072-4079.
45. Chen, Y. T., Lee, D., J. Micromech. Microeng. 2007, 17, 1978-1984.
46. Carlier, J., Chuda, K., Arscott, S., Thomy, V., Verbeke, B., Coqueret, X., Camart, J. C., Druon, C., Tabourier, P., J. Micromech. Microeng. 2006, 16, 2211-2219.
47. Dai, W., Lian, K., Wang, W. J., Microsyst. Technol. 2005, 11, 526-534.
48. Coltro, W. K. T., Piccin, E., da Silva, J. A. F., do Lago, C. L., Carrilho, E., Lab Chip 2007, 7, 931-934.
49. Santana, P. P., Segato, T. P., Carrilho, E., Lima, R. S., Dossi, N., Kamogawa, M. Y., Gobbi, A. L., Piazzeta, M. H., Piccin, E., Analyst 2013, 138, 1660-1664.
50. Jiguet, S., Bertsch, A., Judelewicz, M., Hofmann, H., Renaud, P., Microelectron. Eng. 2006, 83, 1966-1970.
51. Du, L. Q., Wang, Q. J., Zhang, X. L., Sci. China Tech. Sci. 2010, 53, 3006-3013.
52. Li, B., Liu, M., Chen, Q. F., J. Microlith. Microfab. 2005, 4, 043008.
53. Anhoj, T. A., Jorgensen, A. M., Zauner, D. A., Hübner, J., J. Micromech. Microeng. 2006, 16, 1819-1824.
54. Pfeifer, K., Fink, M., Gruetzner, G., Bleidiessel, G., Schulz, H., Scheer, H., Microelectron. Eng. 2001, 57-58, 381-387.
55. Tuomikoski, S., Franssila, S., Phys. Scripta 2004, T114, 223-226.
56. Zhou, Z., Huang, Q. A., Li, W. H., Lu, W., Zhu, Z., Feng, M., IEEE Sensors 2007, 1-3, 325-328.
57. Pan, C. T., Yang, H., Shen, S. C., Chou, M. C., Chou, H. P., J. Micromech. Microeng. 2002, 12, 611-615.
58. Beh, C. W., Zhou, W., Wang, T. H., Lab Chip 2012, 12, 4120-4127.
59. Baker, D. R., Capillary Electrophoresis, John Wiley & Sons, New York 1995.
60. Coltro, W. K. T., Lunte, S. M., Carrilho, E., Electrophoresis 2008, 29, 4928-4937.
61. Prakash, S., Piruska, A., Gatimu, E. N., Bohn, P. W., Sweedler, J. V., Shannon, M. A., IEEE Sens. J. 2008, 8, 441-450.
62. Piruska, A., Gong, M., Sweedler, J. V., Bohn, P. W., Chem. Soc. Rev. 2010, 39, 1060-1072.
63. Helbo, B., Kristensen, A., Menon, A., J. Micromech. Microeng. 2003, 13, 307-311.
64. Melai, J., Salm, C., Smits, S., Visschers, J., Schimitz, J., J. Micromech. Microeng. 2009, 19, 065012.
65. Kim, H. J., Shao, Q., Kim, Y-H., Surf. Coat. Tech. 2003, 171, 39-45.
66. Farcich, N. J., Salonen, J., Asbeck, P. M., IEEE Trans. Microw. Theory Tech. 2008, 56, 2963-2971.