Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 619-624

  Carlier, J ^a   Arscott, S ^a,b   Thomy, V ^a   Fourrier, J C ^a   Caron, F ^a   Camart, J C ^a   Druon, C ^a   Tabourier, P ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BOND STRENGTH (MATERIALS); CAPILLARY TUBES; FLUIDICS; HYDRODYNAMICS; MASS SPECTROMETRY; PHOTORESISTORS; PRESSURE EFFECTS; PROTEINS;

MICROCHANNELS; MICROSYSTEMS; PYREX WAFER; WAFER BONDING; WATERTIGHT;

MICROELECTROMECHANICAL DEVICES;

EID: 2342620804     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/024     Document Type: Article

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