The electrical conduction and dielectric strength of SU-8

Journal of Micromechanics and Microengineering

Volumn 19, Issue 6, 2009, Pages

  Melai, Joost ^a   Salm, Cora ^a   Smits, Sander ^a   Visschers, Jan ^b   Schmitz, Jurriaan ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b NIKHEF   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC BEHAVIOR; DIELECTRIC STRENGTHS; ELECTRICAL CONDUCTION; HIGH-VOLTAGES; SU-8 PHOTORESIST; VARYING THICKNESS;

PHOTORESISTS;

THERMIONIC EMISSION;

EID: 70349971063     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/6/065012     Document Type: Article

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