A SU-8-based microfabricated implantable inductively coupled passive RF wireless intraocular pressure sensor

Journal of Microelectromechanical Systems

Volumn 21, Issue 6, 2012, Pages 1338-1346

  Xue, Ning ^a   Chang, Sung Pil ^b   Lee, Jeong Bong ^a  

^a The University of Texas at Dallas   (United States)

^b Inha University   (South Korea)

Author keywords

Intraocular pressure (IOP) sensor; RF microelectromechanical systems (RF MEMS); SU 8; wireless inductive coupling

Indexed keywords

BIOLOGICAL TISSUES; EXTERNAL COILS; FREQUENCY SHIFT; GROWING DEMAND; HUMAN DISEASE; INDUCTIVE COUPLINGS; INDUCTIVELY-COUPLED; INTRA OCULAR PRESSURE; METAL INSULATOR METALS; MICROFABRICATED; MONITORING APPLICATIONS; NON-CONTACT DETECTION; PLANAR SPIRALS; PRESSURE SENSITIVE; RF MICROELECTROMECHANICAL SYSTEMS; RF WIRELESS; STACKING LAYERS; SU-8; WIRELESS PRESSURE SENSORS; WIRELESS SENSING;

GOLD; MICROFABRICATION; PRESSURE SENSORS;

ELECTROMAGNETIC INDUCTION;

EID: 84870557349     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2206072     Document Type: Article

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