Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2311-2313

  Larsen, Tom ^a   Keller, Stephan ^a   Schmid, Silvan ^a   Dohn, Søren ^a   Boisen, Anja ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Bimorph cantilevers; Humidity; SU 8; Temperature sensing

Indexed keywords

AMBIENT ATMOSPHERE; BIMORPH CANTILEVER; DIFFERENT EFFECTS; HIGHLY SENSITIVE; NITROGEN ATMOSPHERES; SILICON RICH NITRIDES; SU-8; TEMPERATURE CHANGES; TEMPERATURE CHARACTERISTIC; TEMPERATURE RESPONSE; TEMPERATURE SENSING; THEORETICAL VALUES; TRANSVERSE BENDING; TWO-MATERIALS;

COATED MATERIALS; NANOCANTILEVERS; NITRIDES; TEMPERATURE MEASUREMENT; THERMAL EVAPORATION; THERMAL EXPANSION;

ATMOSPHERIC TEMPERATURE;

EID: 79960057067     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.015     Document Type: Conference Paper

References (13)

1. S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen Applied Physics Letters 86 2005 233501
2. H.P. Lang, M.K. Baller, R. Berger, C. Gerber, J.K. Gimzewski, F.M. Battiston, P. Fornaro, J.P. Ramseyer, E. Meyer, and H.J. Guntherodt Analytica Chimica Acta 393 1999 59 65
3. X.M. Yu, Y.L. Yi, S.L. Ma, M. Liu, X.H. Liu, L.Q. Dong, and Y.J. Zhao Journal of Micromechanics and Microengineering 18 2008 057001
4. Y.H. Lin, M.E. McConney, M.C. LeMieux, S. Peleshanko, C.Y. Jiang, S. Singamaneni, and V.V. Tsukruk Advanced Materials 18 2006 1157 1161
5. J.Y. Fu, D.P. Chen, and T.C. Ye Science China-Technological Sciences 53 2010 1184 1189
6. J.K. Gimzewski, C. Gerber, E. Meyer, and R.R. Schlittler Chemical Physics Letters 217 1994 589 594
7. S.H. Lim, J. Choi, R. Horowitz, and A. Majumdar Journal of Microelectromechanical Systems 14 2005 683 690
8. M.C. LeMieux, M.E. McConney, Y.H. Lin, S. Singamaneni, H. Jiang, T.J. Bunning, and V.V. Tsukruk Nano Letters 6 2006 730 734
9. N.V. Lavrik, M.J. Sepaniak, and P.G. Datskos Review of Scientific Instruments 75 2004 2229 2253
10. S. Schmid, S. Kuhne, and C. Hierold Journal of Micromechanics and Microengineering 19 2009 065018
11. J. Matovic, and Z. Jaksic Microsystem Technologies- Micro- and Nanosystems- Information Storage and Processing Systems 16 2010 755 763
12. Silvan Schmid, Electrostatically Actuated All-Polymer Microbeam Resonators - Characterization and Application, Scientific Reports on Micro and Nanosystems, Vol. 6, Der Andere Verlag, Tönning, Germany, 2009.
13. I.K. Lin, X. Zhang, and Y.H. Zhang Journal of Micromechanics and Microengineering 19 2009 085010