BETTS: Bonding, exposing and transferring technique in SU-8 for microsystems fabrication

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Aracil, Carmen ^a   Perdigones, Francisco ^a   Moreno, J Miguel ^a   Quero, José M ^a  

^a UNIVERSIDAD DE SEVILLA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACETATE FILMS; FABRICATION COST; FABRICATION PROCESS; LOW ADHESION; MEMSDEVICES; MICRO VALVES; MICRO-CHAMBERS; MICROCHANNEL NETWORK; OXYGEN PLASMAS; SU-8 MICROSTRUCTURES; SU-8 STRUCTURE; THREE-DIMENSIONAL STRUCTURE; TRANSPARENT SUBSTRATE; UV EXPOSURE; VACUUM SYSTEM;

MICROCHANNELS; OXYGEN; POLYCHLORINATED BIPHENYLS; PUMPS; SILICONES;

FABRICATION;

EID: 76449095248     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035008     Document Type: Article

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