Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

Journal of Micromechanics and Microengineering

Volumn 21, Issue 3, 2011, Pages

  Rouabah, Hamza A ^a   Park, Benjamin Y ^b   Zaouk, Rabih B ^b   Morgan, Hywel ^a   Madou, Marc J ^b   Green, Nicolas G ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3-D ELECTRODES; BACK PRESSURES; ELECTROKINETIC PUMPS; ELECTROOSMOTIC PUMPS; FLUID CONTROL; FLUID FLOW; HIGH ASPECT RATIO; LAB-ON-A-CHIP DEVICES; MEMS TECHNOLOGY; MICRO PUMP; PLANAR ELECTRODE;

ASPECT RATIO; ELECTRODES; ELECTROLYSIS; ELECTROOSMOSIS; FLOW OF FLUIDS; FLUIDS; PYROLYSIS; THREE DIMENSIONAL;

PUMPS;

EID: 79952675096     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/3/035018     Document Type: Article

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