High pressure-resistant SU-8 microchannels for monolithic porous structure integration

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2211-2219

  Carlier, Julien ^a   Chuda, Katarzyna ^b   Arscott, Steve ^a   Thomy, Vincent ^a   Verbeke, Bernard ^a   Coqueret, Xavier ^b   Camart, Jean Christophe ^a   Druon, Christian ^a   Tabourier, Pierre ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNITÉ DE CATALYSE ET DE CHIMIE DU SOLIDE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIGESTIVE SYSTEM; HIGH PRESSURE EFFECTS; PHOTORESISTS; POROUS MATERIALS; PROTEINS; SALT REMOVAL; SPECTROSCOPIC ANALYSIS;

IN SITU DIGESTION; INTEGRATED LAB ON CHIP (LOC) MICROSYSTEMS; SOLVENTS RESISTANT; SU 8 MICROCHANNELS;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 33748772010     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/039     Document Type: Article

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