Self-assembled self-cleaning broadband anti-reflection coatings

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 439, Issue , 2013, Pages 84-100

  Askar, Khalid ^a   Phillips, Blayne M ^a   Fang, Yin ^a   Choi, Baeck ^a   Gozubenli, Numan ^a   Jiang, Peng ^a   Jiang, Bin ^b  

^a University of Florida   (United States)

^b PORTLAND STATE UNIVERSITY   (United States)

Author keywords

Anti reflection coating; Biomimetics; Bottom up; Colloidal crystal; Nanofabrication; Self assembly

Indexed keywords

BIOMIMETICS; NANOTECHNOLOGY; OPTOELECTRONIC DEVICES; SELF ASSEMBLY; SPIN GLASS;

BOTTOM-UP; BROADBAND ANTI REFLECTIONS; BROADBAND MULTILAYER; COLLOIDAL CRYSTALS; COLLOIDAL SELF-ASSEMBLY; CRYSTALLINE SILICONS; LANGMUIR-BLODGETT ASSEMBLY; TRANSPARENT SUBSTRATE;

COATINGS;

ALUMINUM OXIDE; GALLIUM ARSENIDE; GLASS; NANOPARTICLE; POLYELECTROLYTE; POLYSTYRENE; POLYURETHAN; SILICON CARBIDE; SILICON DIOXIDE; SILICON NITRIDE; TITANIUM DIOXIDE;

ANTI REFLECTION COATING; ARTICLE; CENTRIFUGATION; CRYSTALLIZATION; ELECTRON BEAM; EVAPORATION; FILM; MATERIAL COATING; PARTICLE SIZE; PHASE SEPARATION; PRIORITY JOURNAL; REFRACTION INDEX; SEDIMENTATION; SEMICONDUCTOR; TEMPERATURE; THICKNESS; VACUUM;

EID: 84886949145     PISSN: 09277757     EISSN: 18734359     Source Type: Journal    
DOI: 10.1016/j.colsurfa.2013.03.004     Document Type: Article

References (163)

1. Du Y., Luna L.E., Tan W.S., Rubner M.F., Cohen R.E. Hollow silica nanoparticles in UV-visible antireflection coatings for poly(methyl methacrylate) substrates. ACS Nano 2010, 4:4308-4316.
2. Chen D. Anti-reflection (AR) coatings made by sol-gel processes: a review. Sol. Energ. Mater. Sol. C 2001, 68:313-336.
3. Hiller J.A., Mendelsohn J.D., Rubner M.F. Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers. Nat. Mater. 2002, 1:59-63.
4. Huang Y.-F., Chattopadhyay S., Jen Y.-J., Peng C.-Y., Liu T.-A., Hsu Y.-K., Pan C.-L., Lo H.-C., Hsu C.-H., Chang Y.-H., Lee C.-S., Chen K.-H., Chen L.-C. Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures. Nat. Nanotechnol. 2007, 2:770-774.
5. Prado R., Beobide G., Marcaide A., Goikoetxea J., Aranzabe A. Development of multifunctional sol-gel coatings: anti-reflection coatings with enhanced self-cleaning capacity. Sol. Energ. Mater. Sol. C 2010, 94:1081-1088.
6. 2-based energy efficient window. Sol. Energ. Mater. Sol. C 2004, 83:29-37.
7. Yoldas B.E., Partlow D.P. Formation of broad band antireflective coatings on fused silica for high power laser applications. Thin Solid Films 1985, 129:1-14.
8. Nostell P., Roos A., Karlsson B. Optical and mechanical properties of sol-gel antireflective films for solar energy applications. Thin Solid Films 1999, 351:170-175.
9. Cook K.T., Tettey K.E., Bunch R.M., Lee D., Nolte A.J. One-step index-tunable antireflection coatings from aggregated silica nanoparticles. ACS Appl. Mater. Interface 2012, 4:6426-6431.
10. Southwell W.H. Gradient-index antireflection coatings. Opt. Lett. 1983, 8:584-586.
11. Xi J.Q., Schubert M.F., Kim J.K., Schubert E.F., Chen M., Lin S.-Y., LiuW, Smart J.A. Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection. Nat. Photon. 2007, 1:176-179.
12. Fowles G.R. Introduction to Modern Optics 1989, second edition.
13. 2/SiN antireflection coating for Si solar cells. IEEE Trans. Electron Dev. 1993, 40:1161-1165.
14. Nagel H., Aberle A.G., Hezel R. Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide. Prog. Photovoltaics 1999, 7:245-260.
15. 2 thin films by plasma enhanced chemical vapor deposition for antireflection coating. J. Non-Cryst. Solids 1997, 216:77-82.
16. Doshi P., Jellison G.E., Rohatgi A. Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics. Appl. Opt. 1997, 36:7826-7837.
17. Kishore R., Singh S.N., Das B.K. PECVD grown silicon nitride AR coatings on polycrystalline silicon solar cells. Sol. Energ. Mater. Sol. C 1992, 26:27-35.
18. 2 films prepared by remote plasma-enhanced chemical vapour deposition-a novel antireflection coating technology for photovoltaic modules. Sol. Energ. Mater. Sol. C 2001, 65:71-77.
19. Johnson C.C., Wydeven T., Donohoe K. Plasma-enhanced CVD silicon nitride antireflection coatings for solar cells. Sol. Energ. 1983, 31:355-358.
20. Ristau D., Günster S., Bosch S., Duparré A., Masetti E., Ferré-Borrull J., Kiriakidis G., Peiró F., Quesnel E., Tikhonravov A. Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation. Appl. Opt. 2002, 41:3196-3204.
21. Selhofer H., Ritter E., Linsbod R. Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials. Appl. Opt. 2002, 41:756-762.
22. Yang T.-S., Shiu C.-B., Wong M.-S. Structure and hydrophilicity of titanium oxide films prepared by electron beam evaporation. Surf. Sci. 2004, 548:75-82.
23. 2 films prepared using rf magnetron sputtering and their application to anti-reflection coating. Vacuum 2004, 76:507-515.
24. Ray S., Banerjee R., Basu N., Batabyal A.K., Barua A.K. Properties of tin doped indium oxide thin films prepared by magnetron sputtering. J. Appl. Phys. 1983, 54:3497-3501.
25. Hocine D., Belkaid M.S., Pasquinelli M., Escoubas L., Simon J.J., Rivière G.A., Moussi A. Improved efficiency of multicrystalline silicon solar cells by TiO2 antireflection coatings derived by APCVD process. Mat. Sci. Semicon. Proc. 2013, 16:113-117.
26. Jellison G.E., Rohatgi A. Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics. Appl. Opt. 1997, 36:7826-7837.
27. Sun C.-H., Jiang P., Jiang B. Broadband moth-eye antireflection coatings on silicon. Appl. Phys. Lett. 2008, 92:061112.
28. Askar K., Phillips B.M., Dou X., Lopez J., Smith C., Jiang B., Jiang P. Self-assembled nanoparticle antiglare coatings. Opt. Lett. 2012, 37:4380-4382.
29. Kennemore Iii C.M., Gibson U.J. Ion beam processing for coating MgF2 onto ambient temperature substrates. Appl. Opt. 1984, 23:3608-3611.
30. Schulz U. Review of modern techniques to generate antireflective properties on thermoplastic polymers. Appl. Opt. 2006, 45:1608-1618.
31. Huang X.G., Zhou J., Fu M., Li B., Wang Y.H., Zhao Q., Yang Z.W., Xie Q., Li L.T. Binary colloidal crystals with a wide range of size ratios via template-assisted electric-field-induced assembly. Langmuir 2007, 23:8695-8698.
32. Ibn-Elhaj M., Schadt M. Optical polymer thin films with isotropic and anisotropic nano-corrugated surface topologies. Nature 2001, 410:796-799.
33. 2 nanoparticles: effect of surface charge on multilayer assembly. Langmuir 2007, 23:8833-8837.
34. Lee D., Rubner M.F., Cohen R.E. All-nanoparticle thin-film coatings. Nano Lett. 2006, 6:2305-2312.
35. Shimomura H., Gemici Z., Cohen R.E., Rubner M.F. Layer-by-layer-assembled high-performance broadband antireflection coatings. ACS Appl. Mater. Interface 2010, 2:813-820.
36. Zhao Y., Wang J.S., Mao G.Z. Colloidal subwavelength nanostructures for antireflection optical coatings. Opt. Lett. 2005, 30:1885-1887.
37. Kim B.S., Lee D.H., Kim S.H., An G.-H., Lee K.-J., Myung N.V., Choa Y.-H. Silicon solar cell with nanoporous structure formed on a textured surface. J. Am. Ceram. Soc. 2009, 92:2415-2417.
38. Malekmohammad M., Soltanolkotabi M., Asadi R., Naderi M.H., Erfanian A., Zahedinejad M., Bagheri S., Khaje M. Combining micro- and nano-texture to fabricate an antireflective layer. J. Micro-Nanolith. MEM 2012, 11:013011.
39. Marrero N., Guerrero-Lemus R., González-Díaz B., Borchert D. Effect of porous silicon stain etched on large area alkaline textured crystalline silicon solar cells. Thin Solid Films 2009, 517:2648-2650.
40. Ramizy A., Hassan Z., Omar K., Al-Douri Y., Mahdi M.A. New optical features to enhance solar cell performance based on porous silicon surfaces. Appl. Surf. Sci. 2011, 257:6112-6117.
41. Kursawe M., Anselmann R., Hilarius V., Pfaff G. Nano-particles by wet chemical processing in commercial applications. J. Sol-Gel Sci. Technol. 2005, 33:71-74.
42. Lee Y.-J., Ruby D.S., Peters D.W., McKenzie B.B., Hsu ZnO.J.W.P. Nanostructures as efficient antireflection layers in solar cells. Nano Lett. 2008, 8:1501-1505.
43. Walheim S., Schäffer E., Mlynek J., Steiner U. Nanophase-separated polymer films as high-performance antireflection coatings. Science 1999, 283:520-522.
44. Zhang X.-T., Sato O., Taguchi M., Einaga Y., Murakami T., Fujishima A. Self-cleaning particle coating with antireflection properties. Chem. Mater. 2005, 17:696-700.
45. Chhajed S., Schubert M.F., Kim J.K., Schubert E.F. Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics. Appl. Phys. Lett. 2008, 93:251108.
46. Gemici Z., Schwachulla P.I., Williamson E.H., Rubner M.F., Cohen R.E. Targeted functionalization of nanoparticle thin films via capillary condensation. Nano Lett. 2009, 9:1064-1070.
47. Zhang L., Li Y., Sun J., Shen J. Mechanically stable antireflection and antifogging coatings fabricated by the layer-by-layer deposition process and postcalcination. Langmuir 2008, 24:10851-10857.
48. Zhang L., Li Y., Sun J., Shen J. Layer-by-layer fabrication of broad-band superhydrophobic antireflection coatings in near-infrared region. J. Colloid Interf. Sci. 2008, 319:302-308.
49. Chattopadhyay S., Huang Y.F., Jen Y.J., Ganguly A., Chen K.H., Chen L.C. Anti-reflecting and photonic nanostructures. Mater. Sci. Eng. R 2010, 69:1-35.
50. Clapham P.B., Hutley M.C. Reduction of lens reflexion by the moth eye principle. Nature 1973, 244:281-282.
51. Stavenga D.G., Foletti S., Palasantzas G., Arikawa K. Light on the moth-eye corneal nipple array of butterflies. Proc. R. Soc. B 2006, 273:661-667.
52. Ono Y., Kimura Y., Ohta Y., Nishida N. Antireflection effect in ultrahigh spatial-frequency holographic relief gratings. Appl. Opt. 1987, 26:1142-1146.
53. Zhao J., Green M.A. Optimized antireflection coatings for high-efficiency silicon solar cells. IEEE Trans. Electron Dev. 1991, 38:1925-1934.
54. Linn N.C., Sun C.-H., Jiang P., Jiang B. Self-assembled biomimetic antireflection coatings. Appl. Phys. Lett. 2007, 91:101108.
55. Sun C.-H., Min W.-L., Linn N.C., Jiang P., Jiang B. Templated fabrication of large area subwavelength antireflection gratings on silicon. Appl. Phys. Lett. 2007, 91:231105.
56. Heine C., Morf R.H. Submicrometer gratings for solar energy applications. Appl. Opt. 1995, 34:2476-2482.
57. Kanamori Y., Sasaki M., Hane K. Broadband antireflection gratings fabricated upon silicon substrates. Opt. Lett. 1999, 24:1422-1424.
58. Chen Q., Hubbard G., Shields P.A., Liu C., Allsopp D.W.E., Wang W.N., Abbott S. Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting. Appl. Phys. Lett. 2009, 94:263118.
59. Gombert A., Glaubitt W., Rose K., Dreibholz J., Bläsi B., Heinzel A., Sporn D., Döll W., Wittwer V. Subwavelength-structured antireflective surfaces on glass. Thin Solid Films 1999, 351:73-78.
60. Baker K.M. Highly corrected close-packed microlens arrays and moth-eye structuring on curved surfaces. Appl. Opt. 1999, 38:352-356.
61. Auzelyte V., Flauraud V., Cadarso V.J., Kiefer T., Brugger J. Biomimetic soft lithography on curved nanostructured surfaces. Microelectron. Eng. 2012, 97:269-271.
62. Bae B.J., Hong S.H., Hong E.J., Lee H., Jung G.Y. Fabrication of moth-eye structure on glass by ultraviolet imprinting process with polymer template. Jpn. J. Appl. Phys. 2009, 48:010207.
63. Brunner R., Keil B., Morhard C., Lehr D., Draheim J., Wallrabe U., Spatz Antireflective J. moth-eye structures on tunable optical silicone membranes. Appl. Opt. 2012, 51:4370-4376.
64. Chen X., Fan Z.C., Xu Y., Song G.F., Chen L.H. Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection. Microelectron. Eng. 2011, 88:2889-2893.
65. Choi K., Park S.H., Song Y.M., Cho C., Lee H.S. Robustly nano-tailored honeycomb structure for high-throughput antireflection polymer films. J. Mater. Chem. 2012, 22:17037-17043.
66. Deniz H., Khudiyev T., Buyukserin F., Bayindir M. Room temperature large-area nanoimprinting for broadband biomimetic antireflection surfaces. Appl. Phys. Lett. 2011, 99:183107.
67. Han K.S., Shin J.H., Lee H. Enhanced transmittance of glass plates for solar cells using nano-imprint lithography. Sol. Energ. Mater. Sol. C 2010, 94:583-587.
68. Han K.S., Shin J.H., Yoon W.Y., Lee H. Enhanced performance of solar cells with anti-reflection layer fabricated by nano-imprint lithography. Sol. Energ. Mater. Sol. C 2011, 95:288-291.
69. Han S.Y., Paul B.K., Chang C.H. Nanostructured ZnO as biomimetic anti-reflective coatings on textured silicon using a continuous solution process. J. Mater. Chem. 2012, 22:22906-22912.
70. Hubbard G., Nasir M.E., Shields P., Bowen C.R., Satka A., Parsons K.P., Holmes N.H., Allsopp D.W.E. Angle dependent optical properties of polymer films with a biomimetic anti-reflecting surface replicated from cylindrical and tapered nanoporous alumina. Nanotechnology 2012, 23.
71. 2 nanopatterns for biomimetic antireflection by thermal nanoimprint lithography. Microelectron. Eng. 2012, 100:12-15.
72. Ko D.H., Tumbleston J.R., Henderson K.J., Euliss L.E., DeSimone J.M., Lopez R., Samulski E.T. Biomimetic microlens array with antireflective moth-eye surface. Soft Matter 2011, 7:6404-6407.
73. Ko Y.H., Jin L.H., Cho Y.H. Fabrication of moth eye structures via charged nanoparticle lithography with size and density control. Thin Solid Films 2011, 519:2251-2254.
74. Morhard C., Pacholski C., Lehr D., Brunner R., Helgert M., Sundermann M., Spatz J.P. Tailored antireflective biomimetic nanostructures for UV applications. Nanotechnology 2010, 21.
75. 2 particles. Langmuir 2011, 27:3275-3278.
76. Ou Y., Corell D.D., Dam-Hansen C., Petersen P.M., Ou H.Y. Antireflective sub-wavelength structures for improvement of the extraction efficiency and color rendering index of monolithic white light-emitting diode. Opt. Express 2011, 19:A166-A172.
77. Park H., Shin D., Kang G., Baek S., Kim K., Padilla W.J. Broadband optical antireflection enhancement by integrating antireflective nanoislands with silicon nanoconical-frustum arrays. Adv. Mater. 2011, 23:5796.
78. Senn T., Kutz O., Weniger C., Li J.M., Schoengen M., Lochel H., Wolf J., Gottert P., Lochel B. Integration of moth-eye structures into a poly(dimethylsiloxane) stamp for the replication of functionalized microlenses using UV-nanoimprint lithography. J. Vac. Sci. Technol. B 2011, 29.
79. Shin B.K., Lee T.I., Xiong J., Hwang C., Noh G., Cho J.H., Myoung J.M. Bottom-up grown ZnO nanorods for an antireflective moth-eye structure on CuInGaSe2 solar cells. Sol. Energ. Mater. Sol. C 2011, 95:2650-2654.
80. Silvennoinen M., Paivasaari K., Kaakkunen J.J.J., Tikhomirov V.K., Lehmuskero A., Vahimaa P., Moshchalkov V.V. Imprinting the nanostructures on the high refractive index semiconductor glass. Appl. Surf. Sci. 2011, 257:6829-6832.
81. Song Y.M., Jeong Y., Yeo C.I., Lee Y.T. Enhanced power generation in concentrated photovoltaics using broadband antireflective coverglasses with moth eye structures. Opt. Express 2012, 20:A916-A923.
82. Tanaka S., Fujihara S. Luminescent antireflective coatings with disordered surface nanostructures fabricated by liquid processes. Langmuir 2011, 27:2929-2935.
83. Tommila J., Polojarvi V., Aho A., Tukiainen A., Viheriala J., Salmi J., Schramm A., Kontio J.M., Turtiainen A., Niemi T., Guina M. Nanostructured broadband antireflection coatings on AlInP fabricated by nanoimprint lithography. Sol. Energ. Mater. Sol. C 2010, 94:1845-1848.
84. Yamada N., Kim O.N., Tokimitsu T., Nakai Y., Masuda H. Optimization of anti-reflection moth-eye structures for use in crystalline silicon solar cells. Prog. Photovoltaics 2011, 19:134-140.
85. Min W.L., Betancourt A.P., Jiang P., Jiang B. Bioinspired broadband antireflection coatings on GaSb. Appl. Phys. Lett. 2008, 92:141109.
86. Phillips B.M., Jiang P., Jiang B. Biomimetic broadband antireflection gratings on solar-grade multicrystalline silicon wafers. Appl. Phys. Lett. 2011, 99:191103.
87. Son J., Verma L.K., Danner A.J., Bhatia C.S., Yang H. Enhancement of optical transmission with random nanohole structures. Opt. Express 2011, 19:A35-A40.
88. Jiao F., Huang Q., Ren W., Zhou W., Qi F., Zheng Y., Xie J. Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography. Microelectron. Eng. 2013, 103:126-130.
89. Denkov N.D., Velev O.D., Kralchevsky P.A., Ivanov I.B., Yoshimura H., Nagayama K. Two-dimensional crystallization. Nature 1993, 361:26.
90. Jiang P., Bertone J.F., Hwang K.S., Colvin V.L. Single-crystal colloidal multilayers of controlled thickness. Chem. Mater. 1999, 11:2132-2140.
91. Vlasov Y.A., Bo X.-Z., Sturm J.C., Norris D.J. On-chip natural assembly of silicon photonic bandgap crystals. Nature 2001, 414:289-293.
92. Wong S., Kitaev V., Ozin G.A. Colloidal crystal films: advances in universality and perfection. J. Am. Chem. Soc. 2003, 125:15589-15598.
93. Lin Y., Skaff H., Emrick T., Dinsmore A.D., Russell T.P. Nanoparticle assembly and transport at liquid-liquid interfaces. Science 2003, 299:226-229.
94. Dong A., Chen J., Vora P.M., Kikkawa J.M., Murray C.B. Binary nanocrystal superlattice membranes self-assembled at the liquid-air interface. Nature 2010, 466:474-477.
95. Blanco A., Chomski E., Grabtchak S., Ibisate M., John S., Leonard S.W., Lopez C., Meseguer F., Miguez H., Mondia J.P., Ozin G.A., Toader O., van Driel H.M. Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres. Nature 2000, 405:437-440.
96. Mayoral R., Requena J., Moya J.S., López C., Cintas A., Miguez H., Meseguer F., Vázquez L., Holgado M., Blanco Á. 3D Long-range ordering in ein SiO2 submicrometer-sphere sintered superstructure. Adv. Mater. 1997, 9:257-260.
97. Jethmalani J.M., Ford W.T., Beaucage G. Crystal structures of monodisperse colloidal silica in poly(methyl acrylate) films. Langmuir 1997, 13:3338-3344.
98. Pieranski P. Colloidal crystals. Contemp. Phys. 1983, 24:25-73.
99. Ashert S.A. Thermally switchable periodicities and diffraction from mesoscopically ordered materials. J. King Abdulaziz Univ. Sci. 1996, 274:959.
100. Yethiraj A., van Blaaderen A. A colloidal model system with an interaction tunable from hard sphere to soft and dipolar. Nature 2003, 421:513-517.
101. Cui Y., Björk M.T., Liddle J.A., Sönnichsen C., Boussert B., Alivisatos A.P. Integration of colloidal nanocrystals into lithographically patterned devices. Nano Lett. 2004, 4:1093-1098.
102. Ozin G.A., Yang S.M. The race for the photonic chip: colloidal crystal assembly in silicon wafers. Adv. Funct. Mater. 2001, 11:95-104.
103. van Blaaderen A., Ruel R., Wiltzius P. Template-directed colloidal crystallization. Nature 1997, 385:321-324.
104. Yin Y., Lu Y., Gates B., Xia Y. Template-assisted self-assembly: a practical route to complex aggregates of monodispersed colloids with well-defined sizes, shapes, and structures. J. Am. Chem. Soc. 2001, 123:8718-8729.
105. Prevo B.G., Hon E.W., Velev O.D. Assembly and characterization of colloid-based antireflective coatings on multicrystalline silicon solar cells. J. Mater. Chem. 2007, 17:791-799.
106. Jiang H., Yu K., Wang Y.C. Antireflective structures via spin casting of polymer latex. Opt. Lett. 2007, 32:575-577.
107. Stober W., Fink A., Bohn E. Controlled growth of monodisperse silica spheres in micron size range. J. Colloid Interf. Sci. 1968, 26. 62-&.
108. Macleod H.A. Thin-Film Optical Filters 2001, Institute of Physics Publishing. third edn.
109. Jin J. The Finite Element Method in Electromagnetics 2002, John Wiley and Sons. 2nd edn.
110. Jiang P., McFarland.M.J. Large-scale fabrication of wafer-size colloidal crystals, macroporous polymers and nanocomposites by spin-coating. J. Am. Chem. Soc. 2004, 126:13778-13786.
111. Jiang P., Prasad T., McFarland M.J., Colvin V.L. Two-dimensional nonclose-packed colloidal crystals formed by spincoating. Appl. Phys. Lett. 2006, 89:011908.
112. Madou M.J. Fundamentals of Microfabrication: the Science of Miniaturization 2002, CRC Press. 2nd edn.
113. Deckman H.W., Dunsmuir J.H. Natural lithography. Appl. Phys. Lett. 1982, 41:377-379.
114. Hulteen J.C., Vanduyne R.P. Nanosphere lithography - a materials general fabrication process for periodic particle array surfaces. J. Vac. Sci. Technol. A 1995, 13:1553-1558.
115. Haynes C.L., Van Duyne R.P. Nanosphere lithography: a versatile nanofabrication tool for studies of size-dependent nanoparticle optics. J. Phys. Chem. B 2001, 105:5599-5611.
116. Kosiorek A., Kandulski W., Chudzinski P., Kempa K., Giersig M. Shadow nanosphere lithography: Simulation and experiment. Nano Lett. 2004, 4:1359-1363.
117. Min W.L., Jiang P., Jiang B. Large-scale assembly of colloidal nanoparticles and fabrication of periodic subwavelength structures. Nanotechnology 2008, 19:475604.
118. Russel W.B., Saville D.A., Schowalter W.R. Colloidal Dispersions 1989, Cambridge University Press.
119. Hoffman R.L. Discontinuous and dilatant viscosity behavior in concentrated suspensions. 1. Observation of a flow instability. Trans. Soc. Rheol. 1972, 16:155-165.
120. Jiang P. Wafer-scale fabrication of periodic polymer attolitre microvial arrays. Chem. Commun. 2005, 169:9-170. 1.
121. Sun C.H., Min W.L., Linn N.C., Jiang P., Jiang B. Large-scale assembly of periodic nanostructures with metastable square lattices. J. Vac. Sci. Technol. B 2009, 27:1043-1047.
122. Ackerson B.J., Clark N.A. Shear-induced partial translational ordering of a colloidal solid. Phys. Rev. A 1984, 30:906-918.
123. Ackerson B.J. Shear induced order of hard-sphere suspensions. J. Phys. 1990, 2:SA389-SA392.
124. Chen L.B., Ackerson B.J., Zukoski C.F. Rheological consequences of microstructural transitions in colloidal crystals. J. Rheol. 1994, 38:193-216.
125. Amos R.M., Shepherd T.J., Rarity J.G., Tapster P. Shear-ordered face-centred cubic photonic crystals. Electron Lett. 2000, 36:1411-1412.
126. Dux C., Versmold H. Light diffraction from shear ordered colloidal dispersions. Phys. Rev. Lett. 1997, 78:1811-1814.
127. Versmold H. Neutron-diffraction from shear ordered colloidal dispersions. Phys. Rev. Lett. 1995, 75:763-766.
128. Wu Y.L., Derks D., van Blaaderen A., Imhof A. Melting and crystallization of colloidal hard-sphere suspensions under shear. Proc. Natl. Acad. Sci. U.S.A. 2009, 106:10564-10569.
129. Tang C.B., Lennon E.M., Fredrickson G.H., Kramer E.J., Hawker C.J. Evolution of block copolymer lithography to highly ordered square arrays. Science 2008, 322:429-432.
130. Luque A., Hegedus S. Handbook of Photovoltaic Science and Engineering 2003, John Wiley & Sons, West Sussex.
131. Poortmans J., Arkhipov V. Thin Films Solar cells: Fabrication, Characterization and Applications 2006, John Wiley & Sons, Chichester.
132. Jiang P., McFarland.M.J. Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals. J. Am. Chem. Soc. 2005, 127:3710-3711.
133. Sun C.H., Linn N.C., Jiang P. Templated fabrication of periodic metallic nanopyramid arrays. Chem. Mater. 2007, 19:4551-4556.
134. Henzie J., Kwak E.S., Odom T.W. Mesoscale metallic pyramids with nanoscale tips. Nano Lett. 2005, 5:1199-1202.
135. Moharam M.G., Gaylord T.K. Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc. Am. 1981, 71:811-818.
136. Moharam M.G., Pommet D.A., Grann E.B., Gaylord T.K. Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach. J. Opt. Soc. Am. A 1995, 12:1077-1086.
137. Min W.L., Jiang B., Jiang P. Bioinspired self-cleaning antireflection coatings. Adv. Mater. 2008, 20:3914-3918.
138. Zaidi S.H., Ruby D.S., Gee J.M. Characterization of random reactive ion etched-textured silicon solar cells. IEEE Trans. Electron Devices 2001, 48:1200-1206.
139. Sun C.H., Ho B.J., Jiang B., Jiang P. Biomimetic subwavelength antireflective gratings on GaAs. Opt. Lett. 2008, 33:2224-2226.
140. Oliva E., Dimroth F., Bett A.W. GaAs converters for high power densities of laser illumination. Prog. Photovoltics 2008, 16:289-295.
141. Yamada T., Moto A., Iguchi Y., Takahashi M., Tanaka S., Tanabe T., Takagishi S. 5×5cm(2) GaAs and GaInAs solar cells with high conversion efficiency. J. J. Appl. Phys. 2005, 44:L985-L987.
142. Luca S., Santailler J.L., Rothman J., Belle J.P., Calvat C., Basset G., Passero A., Khvostikov V.P., Potapovich N.S., Levin R.V. GaSb crystals and wafers-for photovoltaic devices. J. Solar Energy Eng. 2007, 129:304-313.
143. Kanamori Y., Kobayashi K., Yugami H., Hane K. Subwavelength antireflection gratings for GaSb in visible and near-infrared wavelengths. Jpn. J. Appl. Phys. 2003, 42:4020-4023.
144. Song H.J., Son M., Park C., Lim H., Levendorf M.P., Tsen A.W., Park J., Choi H.C. Large scale metal-free synthesis of graphene on sapphire and transfer-free device fabrication. Nanoscale 2012, 4:3050-3054.
145. Sun C.H., Gonzalez A., Linn N.C., Jiang P., Jiang B. Templated biomimetic multifunctional coatings. Appl. Phys. Lett. 2008, 92:051107.
146. Huang W.H., Sun C.H., Min W.L., Jiang P., Jiang B. Templated fabrication of periodic binary nanostructures. J. Phys. Chem. C 2008, 112:17586-17591.
147. Jiang P. Surface-templated nanostructured films with two-dimensional ordered arrays of voids. Angew. Chem. Int. Ed. 2004, 43:5625-5628.
148. Jiang P. Large-scale fabrication of periodic nanostructured materials by using hexagonal non-close-packed colloidal crystals as templates. Langmuir 2006, 22:3955-3958.
149. Liu X.F., Linn N.C., Sun C.H., Jiang P. Templated fabrication of metal half-shells for surface-enhanced Raman scattering. Phys. Chem. Chem. Phys. 2010, 12:1379-1387.
150. Liu X.F., Sun C.H., Jiang P. Templated fabrication of periodic arrays of metallic attoliter Petri dishes. Chem. Mater. 2010, 22:1768-1775.
151. Sun C.H., Min W.L., Jiang P. Templated fabrication of sub-100nm periodic nanostructures. Chem. Commun. 2008, 3163-3165.
152. Venkatesh S., Jiang P., Jiang B. Generalized fabrication of two-dimensional non-close-packed colloidal crystals. Langmuir 2007, 23:8231-8235.
153. Sun T.L., Feng L., Gao X.F., Jiang L. Bioinspired surfaces with special wettability. Acc. Chem. Res. 2005, 38:644-652.
154. Genzer J., Efimenko K. Recent developments in superhydrophobic surfaces and their relevance to marine fouling: a review. Biofouling 2006, 22:339-360.
155. Park K.C., Choi H.J., Chang C.H., Cohen R.E., McKinley G.H., Barbastathis G. Nanotextured silica surfaces with robust superhydrophobicity and omnidirectional broadband supertransmissivity. ACS Nano 2012, 6:3789-3799.
156. Shiu J.Y., Kuo C.W., Chen P.L., Mou C.Y. Fabrication of tunable superhydrophobic surfaces by nanosphere lithography. Chem. Mater. 2004, 16:561-564.
157. Yang H.T., Jiang P. Scalable fabrication of superhydrophobic hierarchical colloidal arrays. J. Colloid Interf. Sci. 2010, 352:558-565.
158. Wenzel R.N. Resistance of solid surfaces to wetting by water. Ind. Eng. Chem. 1936, 28:988-994.
159. Cassie A.B.D., Baxter S. Wettability of porous surfaces. Trans. Faraday Soc. 1944, 40:546-550.
160. Guo C.W., Feng L., Zhai J., Wang G.J., Song Y.L., Jiang L., Zhu D.B. Large-area fabrication of a nanostructure-induced hydrophobic surface from a hydrophilic polymer. ChemPhysChem 2004, 5:750-753.
161. Nakae H., Inui R., Hirata Y., Saito H. Effects of surface roughness on wettability. Acta Mater. 1998, 46:2313-2318.
162. Coffinier Y., Janel S., Addad A., Blossey R., Gengembre L., Payen E., Boukherroub R. Preparation of superhydrophobic silicon oxide nanowire surfaces. Langmuir 2007, 23:1608-1611.
163. Bo-Tau Liu, Wei-De Yeh Antireflective surface fabricated from colloidal silica nanoparticles. Colloids Surf. A: Physicochem. Eng. Aspects 2010, 356:145-149.