Optimized antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide

Progress in Photovoltaics: Research and Applications

Volumn 7, Issue 4, 1999, Pages 245-260

  Nagel, Henning ^a   Aberle, Armin G ^a   Hezel, Rudolf ^a  

^a INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CERAMIC COATINGS; LIGHT EXTINCTION; NUMERICAL METHODS; OPTIMIZATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; REFRACTIVE INDEX; SILICA; SILICON NITRIDE;

EXTINCTION COEFFICIENT;

SILICON SOLAR CELLS;

EID: 0032640793     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-159X(199907/08)7:4<245::AID-PIP255>3.0.CO;2-3     Document Type: Article

References (22)

1. J. Zhao and M. A. Green, 'Optimized antireflection coatings for high-efficiency silicon solar cells', IEEE Trans. Electron Devices, 38, 1925 (1991).
2. D. Pavic and M. Mack, 'Reflexionsmindernde Beschichtungen für die Solartechnik', Proc. 7th Symposium Thermische Solarenergie, Ostbayerisches Technologie Transfer Institut, Regensburg (in German) p. 256, 1997.
3. 2/SiN antireflection coating for Si solar cells', IEEE Trans. Electron Devices, 40, 1161 (1993).
4. T. Lauinger, J. Schmidt, A. G. Aberle and R. Hezel, 'Record low surface recombination velocities on 1 Ωcm p-silicon using remote plasma silicon nitride passivation', Appl. Phys. Lett., 68, 1232 (1996).
5. T. Lauinger, A. G. Aberle and R. Hezel, 'Comparison of direct and remote PECVD silicon nitride films for low-temperature surface passivation of p-type crystalline silicon', Proc. 14th European Photovoltaic Solar Energy Conference, p. 853, Stephens, Bedford, 1997.
6. B. Lenkeit, T. Lauinger, A. G. Aberle and R. Hezel, 'Comparison of remote versus direct PECVD silicon nitride passivation of phosphorus-diffused emitters of silicon solar cells', Proc. 2nd World Conference on Photovoltaic Solar Energy Conversion, (in press) Stephens, Bedford, 1998.
7. A. G. Aberle, T. Lauinger and R. Hezel, 'Remote PECVD silicon nitride - a key technology for the crystalline silicon PV industry of the 21st century?', Proc. 14th European Photovoltaic Solar Energy Conference, p. 684. Stephens, Bedford, 1997.
8. B. Harbecke, 'Coherent and incoherent reflection and transmission of multilayer structures', Appl. Phys. B, 39, 165 (1986).
9. W. H. Press, B. P. Flannery, S. A. Teukolsky and W. T. Vetterling, Numerical Recipes in C, p. 305, Cambridge University Press, Cambridge, 1988.
10. J. A. Duffie and W. A. Beckman, Solar Engineering of Thermal Processes, p. 231, Wiley, New York, 1991.
11. Z. Knittl, Optics of Thin Films, p. 474, Wiley, London, 1976.
12. R. Brendel, R. Ziegler and R. Hezel, 'A method for the measurement of thin film optical constants with a spectral photometer from 230 nm to 850 nm and its application to plasma silicon (oxy)nitride', Thin Solid Films, 200, 219 (1991).
13. P. Doshi, G. E. Jellison and A. Rohatgi, 'Characterisation and optimisation of absorbing plasma-enhanced chemical vapour deposited antireflection coatings for silicon photovoltaics', Applied Optics, 36, 7826 (1997).
14. M. A. Green and M. Keevers, 'Optical properties of intrinsic silicon at 300 K', Progress in Photovoltaics, 3, 189 (1995).
15. P. A. Basore, 'PC-ID version 3: Improved speed and convergence', Proc. 22nd IEEE Photovoltaic Specialists Conference, p. 299, IEEE, New York, 1991.
16. M. A. Green, Silicon Solar Cells, Centre for Photovoltaic Devices and Systems, Sydney, p. 333, 1995.
17. E. D. Palik, Handbook of Optical Constants of Solids, p. 400, Academic Press, Boston, 1985.
18. M. Grauvogl, A. G. Aberle and R. Hezel, '17·1% efficient metal-insulator-semiconductor inversion layer silicon solar cells using truncated pyramids', Appl. Phys. Lett., 69, 1462 (1996).
19. A. Hübner, A. G. Aberle and R. Hezel, 'Novel cost-effective bifacial silicon solar cells with 19·4% front and 18·1% rear efficiency', Appl. Phys. Lett., 70, 1008 (1997).
20. A. Gombert and M. Rommel, 'Antireflexbeschichtungen für thermische Solarsysteme', Proc. 7th Symposium Thermische Solarenergie, Ostbayerisches Technologie Transfer Institut, Regensburg (in German) p. 251, 1997.
21. H. Nagel, A. Metz, A. A. Aberle and R. Hezel, 'Photovoltaic module with enhanced optical performance', Proc. 2nd World Conference on Photovoltaic Solar Energy Conversion, (in press) Stephens, Bedford, 1998.
22. A. R. Forouhi and I. Bloomer, 'Optical dispersion relations for amorphous semiconductors and amorphous dielectrics', Physical Review B, 34, 7018 (1986).