Templated fabrication of large area subwavelength antireflection gratings on silicon

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Sun, Chih Hung ^a   Min, Wei Lun ^a   Linn, Nicholas C ^a   Jiang, Peng ^a   Jiang, Bin ^b  

^a University of Florida   (United States)

^b PORTLAND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; MONOLAYERS; SILICON; WET ETCHING;

ANTIREFLECTION GRATINGS; SPECULAR REFLECTION;

DIFFRACTION GRATINGS;

EID: 36849059619     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2821833     Document Type: Article

References (44)

1. US Department of Energy Report of the Basic Energy Sciences Workshop on Solar Energy Utilization, 18-21 April 2005 (unpublished).
2. Handbook of Photovoltaic Science and Engineering, edited by, A. Luque, and, S. Hegedus, (Wiley, West Sussex, 2003), p. 268.
3. P. Doshi, G. E. Jellison, and A. Rohatgi, Appl. Opt. 36, 7826 (1997).
4. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Blasi, A. Heinzel, D. Sporn, W. Doll, and V. Wittwer, Thin Solid Films 351, 73 (1999).
5. B. G. Prevo, E. W. Hon, and O. D. Velev, J. Mater. Chem. 17, 791 (2007).
6. D. G. Chen, Sol. Energy Mater. Sol. Cells 68, 313 (2001).
7. P. Lalanne and G. M. Morris, Nanotechnology 8, 53 (1997).
8. S. Chattopadhyay, L. C. Chen, and K. H. Chen, Crit. Rev. Solid State Mater. Sci. 31, 15 (2006).
9. P. T. Hammond, Adv. Mater. (Weinheim, Ger.) 16, 1271 (2004).
10. J. Hiller, J. D. Mendelsohn, and M. F. Rubner, Nat. Mater. 1, 59 (2002).
11. M. Ibn-Elhaj and M. Schadt, Nature (London) 410, 796 (2001).
12. H. Y. Koo, D. K. Yi, S. J. Yoo, and D. Y. Kim, Adv. Mater. (Weinheim, Ger.) 16, 274 (2004).
13. B. G. Prevo, Y. Hwang, and O. D. Velev, Chem. Mater. 17, 3642 (2005).
14. S. Walheim, E. Schaffer, J. Mlynek, and U. Steiner, Science 283, 520 (1999).
15. Z. Z. Wu, J. Walish, A. Nolte, L. Zhai, R. E. Cohen, and M. F. Rubner, Adv. Mater. (Weinheim, Ger.) 18, 2699 (2006).
16. J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. F. Chen, S. Y. Lin, W. Liu, and J. A. Smart, Nat. Photonics 1, 176 (2007).
17. P. B. Clapham and M. C. Hutley, Nature (London) 244, 281 (1973).
18. D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, Proc. R. Soc. London, Ser. B 273, 661 (2006).
19. C. Aydin, A. Zaslavsky, G. J. Sonek, and J. Goldstein, Appl. Phys. Lett. 80, 2242 (2002).
20. C. Heine and R. H. Morf, Appl. Opt. 34, 2476 (1995).
21. Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. 78, 142 (2001).
22. Y. Kanamori, E. Roy, and Y. Chen, Microelectron. Eng. 78-79, 287 (2005).
23. Y. Kanamori, M. Sasaki, and K. Hane, Opt. Lett. 24, 1422 (1999).
24. F. Nikolajeff, B. Lofving, M. Johansson, J. Bengtsson, S. Hard, and C. Heine, Appl. Opt. 39, 4842 (2000).
25. C. C. Striemer and P. M. Fauchet, Appl. Phys. Lett. 81, 2980 (2002).
26. S. Wang, X. Z. Yu, and H. T. Fan, Appl. Phys. Lett. 91, 061105 (2007).
27. C. T. Wu, F. H. Ko, and C. H. Lin, Appl. Phys. Lett. 90, 171911 (2007).
28. Z. N. Yu, H. Gao, W. Wu, H. X. Ge, and S. Y. Chou, J. Vac. Sci. Technol. B 21, 2874 (2003).
29. E. B. Grann, M. G. Moharam, and D. A. Pommet, J. Opt. Soc. Am. A 12, 333 (1995).
30. W. H. Southwell, J. Opt. Soc. Am. A 8, 549 (1991).
31. B. S. Thornton, J. Opt. Soc. Am. 65, 267 (1975).
32. J. Zhao and M. A. Green, IEEE Trans. Electron Devices 38, 1925 (1991).
33. P. Jiang and M. J. McFarland, J. Am. Chem. Soc. 126, 13778 (2004).
34. P. Jiang, T. Prasad, M. J. McFarland, and V. L. Colvin, Appl. Phys. Lett. 89, 011908 (2006).
35. N. C. Linn, C. H. Sun, P. Jiang, and B. Jiang, Appl. Phys. Lett. 91, 101108 (2007).
36. P. Jiang and M. J. McFarland, J. Am. Chem. Soc. 127, 3710 (2005).
37. C. H. Sun, N. C. Linn, and P. Jiang, Chem. Mater. 19, 4551 (2007).
38. P. Jiang, Langmuir 22, 3955 (2006).
39. J. Henzie, E. S. Kwak, and T. W. Odom, Nano Lett. 5, 1199 (2005).
40. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. 71, 811 (1981).
41. M. G. Moharam and T. K. Gaylord, J. Opt. Soc. Am. A 3, 1780 (1986).
42. M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, J. Opt. Soc. Am. A 12, 1077 (1995).
43. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, Bristol, 2001), p. 40.
44. M. A. Green and M. Keevers, Prog. Photovoltaics 3, 189 (1995).