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Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

Integration of moth-eye structures into a poly(dimethylsiloxane) stamp for the replication of functionalized microlenses using UV-nanoimprint lithography

(9) Senn, Tobias a Kutz, Oliver a Weniger, Christian a Li, Junming b Schoengen, Max a Löchel, Heike a Wolf, Johannes a Göttert, Philipp a Löchel, Bernd a

a HAHN MEITNER INSTITUT (Germany)

b HUMBOLDT UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; INTEGRATION; MICROCHANNELS; MICROLENSES; THERMOFORMING;

ANTI-REFLECTIVE LAYERS; FABRICATION PROCESS; MANUFACTURING PROCESS; OPTICAL PERFORMANCE; POLYDIMETHYLSILOXANE PDMS; REPLICATION PROCESS; TECHNOLOGICAL SOLUTION; UV NANOIMPRINT LITHOGRAPHY;

NANOIMPRINT LITHOGRAPHY;

EID: 84255184209 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3644474 Document Type: Article

Times cited : (12)

References (22)

1
- 0037099318
- Performance of an integrated microoptical system for fluorescence detection in microfluidic systems
- DOI 10.1021/ac0112465
- J. Roulet, R. Völkel, H. P. Herzig, E. Verpoorte, N. F. de Rooij, and R. Dändliker, Anal. Chem. 74, 3400 (2002). 10.1021/ac0112465 (Pubitemid 34764946)
- (2002) Analytical Chemistry , vol.74 , Issue.14 , pp. 3400-3407
- Roulet, J.-C.¹ Volkel, R.² Herzig, H.P.³ Verpoorte, E.⁴ De Rooij, N.F.⁵ Dandliker, R.⁶

2
- 33750008657
- Organic light emitting devices with enhanced outcoupling via microlenses fabricated by imprint lithography
- DOI 10.1063/1.2356904
- Y. Sun and S. R. Forrest, J. Appl. Phys. 100, 073106 (2006). 10.1063/1.2356904 (Pubitemid 44570647)
- (2006) Journal of Applied Physics , vol.100 , Issue.7 , pp. 073106
- Sun, Y.¹ Forrest, S.R.²

3
- 84905952296
- R. Völkel, Mikroproduktion 01/09, 52 (2009).
- (2009) Mikroproduktion , vol.1-9 , pp. 52
- Völkel, R.¹

4
- 76949099295
- 10.1016/j.mee.2009.11.069
- H. Schmitt, M. Rommel, A. Bauer, L. Frey, A. Bich, M. Eisner, R. Voelkel, and M. Hornung, Microelectron. Eng. 87, 1074 (2010). 10.1016/j.mee.2009.11.069
- (2010) Microelectron. Eng. , vol.87 , pp. 1074
- Schmitt, H.¹ Rommel, M.² Bauer, A.³ Frey, L.⁴ Bich, A.⁵ Eisner, M.⁶ Voelkel, R.⁷ Hornung, M.⁸

5
- 77049099631
- 10.1117/12.852776
- H. Han and K. Main, Proc. SPIE 7631, 76311P (2009). 10.1117/12.852776
- (2009) Proc. SPIE , vol.7631
- Han, H.¹ Main, K.²

6
- 77955514779
- 10.1016/j.mee.2010.03.012
- S. S. Oh, C. Choi, and Y. Kim, Microelectron. Eng. 87, 2328 (2010). 10.1016/j.mee.2010.03.012
- (2010) Microelectron. Eng. , vol.87 , pp. 2328
- Oh, S.S.¹ Choi, C.² Kim, Y.³

7
- 17744409842
- 10.1117/1.1557171
- S. Ziokowski, I. Frese, H. Kasprzak, and S. Kufner, Opt. Eng. 42, 1451 (2003). 10.1117/1.1557171
- (2003) Opt. Eng. , vol.42 , pp. 1451
- Ziokowski, S.¹ Frese, I.² Kasprzak, H.³ Kufner, S.⁴

8
- 0000432857
- 10.1002/(SICI)1521-3773(19980316)37:5<>1.0.CO;2-6
- Y. Xia and G. M. Whitesides, Angew. Chem., Int. Ed. 37, 550 (1998). 10.1002/(SICI)1521-3773(19980316)37:5<>1.0.CO;2-6
- (1998) Angew. Chem., Int. Ed. , vol.37 , pp. 550
- Xia, Y.¹ Whitesides, G.M.²

9
- 78650717114
- 10.1016/j.mser.2010.04.001
- S. Chattopadhyay, Y. Huang, Y. Jen, A. Ganguly, K. Chen, and L. Chen, Mater. Sci. Eng. R 69, 1 (2010). 10.1016/j.mser.2010.04.001
- (2010) Mater. Sci. Eng. R , vol.69 , pp. 1
- Chattopadhyay, S.¹ Huang, Y.² Jen, Y.³ Ganguly, A.⁴ Chen, K.⁵ Chen, L.⁶

10
- 0033170289
- Subwavelength-structured antireflective surfaces on glass
- DOI 10.1016/S0040-6090(98)01780-5
- A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, Thin Solid Films 351, 73 (1999). 10.1016/S0040-6090(98)01780-5 (Pubitemid 32213732)
- (1999) Thin Solid Films , vol.351 , Issue.1-2 , pp. 73-78
- Gombert, A.¹ Glaubitt, W.² Rose, K.³ Dreibholz, J.⁴ Blasi, B.⁵ Heinzel, A.⁶ Sporn, D.⁷ Doll, W.⁸ Wittwer, V.⁹

11
- 0033735038
- 10.1016/S0038-092X(00)00022-0
- A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Bläsi, A. Heinzel, D. Sporn, W. Döll, and V. Wittwer, Sol. Energy 68, 357 (2000). 10.1016/S0038-092X(00)00022-0
- (2000) Sol. Energy , vol.68 , pp. 357
- Gombert, A.¹ Glaubitt, W.² Rose, K.³ Dreibholz, J.⁴ Bläsi, B.⁵ Heinzel, A.⁶ Sporn, D.⁷ Döll, W.⁸ Wittwer, V.⁹

12
- 0015840393
- 10.1038/244281a0
- P. B. Clapham and M. C. Hutley, Nature 244, 281 (1973). 10.1038/244281a0
- (1973) Nature , vol.244 , pp. 281
- Clapham, P.B.¹ Hutley, M.C.²

13
- 0036646365
- Low-cost thermoforming of micro fluidic analysis chips
- DOI 10.1088/0960-1317/12/4/304, PII S0960131702325415
- R. Truckenmüller, Z. Rummler, T. Schaller, and W. K. Schomburg, J. Micromech. Microeng. 12, 375 (2002). 10.1088/0960-1317/12/4/304 (Pubitemid 34830210)
- (2002) Journal of Micromechanics and Microengineering , vol.12 , Issue.4 , pp. 375-379
- Truckenmuller, R.¹ Rummler, Z.² Schaller, Th.³ Schomburg, W.K.⁴

14
- 33747014865
- 3D tissue culture substrates produced by microthermoforming of pre-processed polymer films
- DOI 10.1007/s10544-006-8174-8
- S. Giselbrecht, T. Gietzelt, E. Gottwald, C. Trautmann, R. Truckenmüller, K. F. Weibezahn, and A. Welle, Biomed. Microdevices 8, 191 (2006). 10.1007/s10544-006-8174-8 (Pubitemid 44203835)
- (2006) Biomedical Microdevices , vol.8 , Issue.3 , pp. 191-199
- Giselbrecht, S.¹ Gietzelt, T.² Gottwald, E.³ Trautmann, C.⁴ Truckenmuller, R.⁵ Weibezahn, K.F.⁶ Welle, A.⁷

15
- 77955854202
- 10.1007/s00542-010-1072-2
- M. Heilig, S. Giselbrecht, A. Guber, and M. Worgull, Microsyst. Technol. 16, 1221 (2010). 10.1007/s00542-010-1072-2
- (2010) Microsyst. Technol. , vol.16 , pp. 1221
- Heilig, M.¹ Giselbrecht, S.² Guber, A.³ Worgull, M.⁴

16
- 79958792530
- 10.1007/s00542-010-1203-9
- M. Heilig, M. Schneider, H. Dinglreiter, and M. Worgull, Microsyst. Technol. 17, 593 (2011). 10.1007/s00542-010-1203-9
- (2011) Microsyst. Technol. , vol.17 , pp. 593
- Heilig, M.¹ Schneider, M.² Dinglreiter, H.³ Worgull, M.⁴

17
- 80051547235
- T. Senn, J. Esquivel, N. Sabaté, and B. Löchel, Microelectron. Eng. 88, 3043 (2011).
- (2011) Microelectron. Eng. , vol.88 , pp. 3043
- Senn, T.¹ Esquivel, J.² Sabaté, N.³ Löchel, B.⁴

18
- 33746677824
- Ph.D. thesis (Albert-Ludwigs-Universität Freiburg i. Br.)
- B. Bläsi, " Holographisch hergestellte Antireflexoberflä chen für solare und visuelle Anwendungen (Holographically produced anti-reflective surfaces for solar and visual applications).," Ph.D. thesis (Albert-Ludwigs-Universität Freiburg i. Br., 2000).
- (2000) Holographisch Hergestellte Antireflexoberflächen für Solare und Visuelle Anwendungen (Holographically Produced Anti-reflective Surfaces for Solar and Visual Applications)
- Bläsi, B.¹

19
- 78049234618
- 10.1016/j.mee.2010.08.003
- T. Senn, C. Waberski, J. Wolf, J. Esquivel, N. Sabaté, and B. Löchel, Microelectron. Eng. 88, 11 (2011). 10.1016/j.mee.2010.08.003
- (2011) Microelectron. Eng. , vol.88 , pp. 11
- Senn, T.¹ Waberski, C.² Wolf, J.³ Esquivel, J.⁴ Sabaté, N.⁵ Löchel, B.⁶

20
- 77953899415
- 10.1088/0960-1317/20/7/075002
- T. Senn, C. Mueller, and H. Reinecke, J. Micromech. Microeng. 20, 075002 (2010). 10.1088/0960-1317/20/7/075002
- (2010) J. Micromech. Microeng. , vol.20 , pp. 075002
- Senn, T.¹ Mueller, C.² Reinecke, H.³

21
- 33646861188
- Antireflective subwavelength structures on crystalline Si fabricated using directly formed anodic porous alumina masks
- DOI 10.1063/1.2205173
- H. Sai, H. Fujii, K. Arafune, Y. Ohshita, M. Yamaguchi, Y. Kanamori, and H. Yugami, Appl. Phys. Lett. 88, 201116 (2006). 10.1063/1.2205173 (Pubitemid 43781758)
- (2006) Applied Physics Letters , vol.88 , Issue.20 , pp. 201116
- Sai, H.¹ Fujii, H.² Arafune, K.³ Ohshita, Y.⁴ Yamaguchi, M.⁵ Kanamori, Y.⁶ Yugami, H.⁷

22
- 84255195395
- MOC08, Brussels, Belgium, 25-27 September (unpublished)
- R. Voelkel., Conference on Micro-Optics, MOC08, Brussels, Belgium, 25-27 September 2008 (unpublished).
- (2008) Conference on Micro-Optics
- Voelkel, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.