Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography

Microelectronic Engineering

Volumn 103, Issue , 2013, Pages 126-130

  Jiao, Fang ^a   Huang, Qiyu ^a   Ren, Wangchun ^a   Zhou, Wei ^a   Qi, Fangyi ^a   Zheng, Yizhou ^a   Xie, Jing ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

AAO mask; Moth eye structure; Solar cells; UV nanoimprinting lithography

Indexed keywords

ALUMINA; CELL MEMBRANES; CURING; FABRICATION; LITHOGRAPHY; MONOCRYSTALLINE SILICON; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; SEMICONDUCTOR JUNCTIONS; SILICON;

ANODIZED ALUMINUM OXIDE; ANTIREFLECTION FILMS; MOTH-EYE STRUCTURE; POROUS ALUMINA MEMBRANES; SILICON P-N JUNCTIONS; SURFACE REFLECTIONS; UV NANOIMPRINT LITHOGRAPHY; UV-NANOIMPRINTING;

SOLAR CELLS;

EID: 84870234321     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.10.012     Document Type: Article

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