Broadband moth-eye antireflection coatings on silicon

Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

  Sun, Chih Hung ^a   Jiang, Peng ^a   Jiang, Bin ^b  

^a University of Florida   (United States)

^b PORTLAND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MONOLAYERS; REFLECTION; SILICON; WAVELENGTH;

BROADBAND MOTH-EYE ANTIREFLECTION COATINGS; TEMPLATING TECHNIQUE;

PROTECTIVE COATINGS;

EID: 39349087173     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2870080     Document Type: Article

References (25)

1. Handbook of Photovoltaic Science and Engineering, edited by, A. Luque, and, S. Hegedus, (Wiley, West Sussex, 2003), p. 268.
2. P. Doshi, G. E. Jellison, and A. Rohatgi, Appl. Opt. APOPAI 0003-6935 36, 7826 (1997).
3. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Blasi, A. Heinzel, D. Sporn, W. Doll, and V. Wittwer, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(98)01780-5 351, 73 (1999).
4. B. G. Prevo, E. W. Hon, and O. D. Velev, J. Mater. Chem. JMACEP 0959-9428 10.1039/b612734g 17, 791 (2007).
5. Thin Film Solar Cells: Fabrication, Characterization and Applications, edited by, J. Poortmans, and, V. Arkhipov, (Wiley, West Sussex, 2006), p. xvii.
6. P. B. Clapham and M. C. Hutley, Nature (London) NATUAS 0028-0836 10.1038/244281a0 244, 281 (1973).
7. D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, Proc. R. Soc. London, Ser. B PRLBA4 0962-8452 10.1098/rspb.2005.3369 273, 661 (2006).
8. C. Aydin, A. Zaslavsky, G. J. Sonek, and J. Goldstein, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1466519 80, 2242 (2002).
9. B. S. Thornton, J. Opt. Soc. Am. JOSAAH 0030-3941 65, 267 (1975).
10. C. Heine and R. H. Morf, Appl. Opt. APOPAI 0003-6935 34, 2476 (1995).
11. Y. Kanamori, E. Roy, and Y. Chen, Microelectron. Eng. MIENEF 0167-9317 78-79, 287 (2005).
12. Z. N. Yu, H. Gao, W. Wu, H. X. Ge, and S. Y. Chou, J. Vac. Sci. Technol. B JVTBD9 1071-1023 10.1116/1.1619958 21, 2874 (2003).
13. U. Schulz, Appl. Opt. APOPAI 0003-6935 10.1364/AO.45.001608 45, 1608 (2006).
14. J. Hiller, J. D. Mendelsohn, and M. F. Rubner, Nat. Mater. NMAACR 1476-1122 10.1038/nmat719 1, 59 (2002).
15. N. H. Finkel, B. G. Prevo, O. D. Velev, and L. He, Anal. Chem. ANCHAM 0003-2700 77, 1088 (2005).
16. D. G. Choi, H. K. Yu, S. G. Jang, and S. M. Yang, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja0319083 126, 7019 (2004).
17. C. L. Haynes and R. P. Van Duyne, J. Phys. Chem. B JPCBFK 1089-5647 10.1021/jp010657m 105, 5599 (2001).
18. C. H. Sun, W. L. Min, C. H. Lin, P. Jiang, and B. Jiang, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2821833 91, 231105 (2007).
19. P. Jiang and M. J. McFarland, J. Am. Chem. Soc. JACSAT 0002-7863 10.1021/ja0470923 126, 13778 (2004).
20. P. Jiang, T. Prasad, M. J. McFarland, and V. L. Colvin, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2218832 89, 011908 (2006).
21. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed. (CRC, Boca Raton, FL, 2002).
22. Y. Kanamori, K. Hane, H. Sai, and H. Yugami, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1339845 78, 142 (2001).
23. M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, J. Opt. Soc. Am. A JOAOD6 0740-3232 12, 1077 (1995).
24. M. A. Green and M. Keevers, Prog. Photovoltaics PPHOED 1062-7995 10.1002/pip.4670030303 3, 189 (1995).
25. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, Bristol, 2001), p. 40.