High frequency top-down junction-less silicon nanowire resonators

Nanotechnology

Volumn 24, Issue 43, 2013, Pages

  Koumela, Alexandra ^a   Hentz, Sébastien ^a   Mercier, Denis ^a   Dupré, Cécilia ^a   Ollier, Eric ^a   Feng, Philip X L ^b   Purcell, Stephen T ^c   Duraffourg, Laurent ^a  

^a CEA GRENOBLE   (France)

^b Case Western Reserve University   (United States)

^c UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATION; ELECTROSTATIC CONTROL; ELECTROSTATIC GATES; ORDERS OF MAGNITUDE; PIEZO-RESISTIVE; ROOM TEMPERATURE; SIGNAL-TO-BACKGROUND RATIO; SILICON NANOWIRES;

BACTERIOPHAGES; ELECTROSTATICS; FIELD EFFECT TRANSISTORS; NANOWIRES; RESONATORS; SIGNAL DETECTION; SIGNAL TRANSDUCTION; SILICON;

SILICON WAFERS;

EID: 84885830843     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/43/435203     Document Type: Article

References (33)

1. O'Connell A D et al 2010 Quantum ground state and single-phonon control of a mechanical resonator Nature 464 697-703
2. Teufel J D, Donner T, Li D, Harlow J W, Allman M S, Cicak K, Sirois A J, Whittaker J D, Lehnert K W and Simmonds R W 2011 Sideband cooling of micromechanical motion to the quantum ground state Nature 475 359-63
3. Kippenberg T J and Vahala K J 2008 Cavity optomechanics: back-action at the mesoscale Science 321 1172-6
4. Nguyen C T C 2007 MEMS technology for timing and frequency control IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 251-70
5. Loh O Y and Espinosa H D 2012 Nanoelectromechanical contact switches Nature Nanotechnol. 7 283-95
6. Wong A and Nguyen C T 2004 Micromechanical mixer-filters (mixlers) J. Microelectromech. Syst. 13 100-12
7. Rugar D, Budakian R, Mamin H J and Chui B W 2004 Single spin detection by magnetic resonance force microscopy Nature 430 329-32 (Pubitemid 38937736)
8. Chaste J, Eichler A, Moser J, Ceballos G, Rurali R and Bachtold A 2012 A nanomechanical mass sensor with yoctogram resolution Nature Nanotechnol. 7 301-4
9. Li M, Tang H X and Roukes M L 2007 Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications Nature Nanotechnol. 2 114-20 (Pubitemid 46226371)
10. Mile E, Jourdan G, Bargatin I, Labarthe S, Marcoux C, Andreucci P, Hentz S, Kharrat C, Colinet E and Duraffourg L 2010 In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection Nanotechnology 21 165504
11. Arcamone J et al 2011 VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors 2011 Int. Electron Devices Mtg pp 669-72
12. Hanay M S, Kelber S, Naik A K, Chi D, Hentz S, Bullard E C, Colinet E, Duraffourg L and Roukes M L 2012 Single-protein nanomechanical mass spectrometry in real time Nature Nanotechnol. 7 602-8
13. Bargatin I, Myers E B, Aldridge J S, Marcoux C, Brianceau P, Duraffourg L, Colinet E, Hentz S, Andreucci P and Roukes M L 2012 Large-scale integration of nanoelectromechanical systems for gas sensing applications Nano Lett. 12 1269-74
14. He R, Feng X L, Roukes M L and Yang P 2008 Self-transducing silicon nanowire electromechanical systems at room temperature Nano Lett. 8 1756-61
15. Bartsch S T, Lovera A, Grogg D and Ionescu A M 2012 Nanomechanical silicon resonators with intrinsic tunable gain and sub-nW power consumption ACS Nano 6 256-64
16. Bartsch S T, Dupré C, Ollier E and Ionescu A M 2012 Resonant-body silicon nanowire field effect transistor without junctions Electron Devices Meeting (IEDM) 2012 IEEE Int. pp 15.2.1-4
17. Ollier E et al 2012 Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications IEEE 25th Int. Conf. on MEMS 2012 pp 1368-71
18. Kanda Y 1982 A graphical representation of the piezoresistance coefficients in silicon IEEE Trans. Electron Devices 29 64-70 (Pubitemid 12474034)
19. Björk M T, Schmid H, Knoch J, Riel H and Riess W 2009 Donor deactivation in silicon nanostructures Nature Nanotechnol. 4 103-7
20. Koumela A, Mercier D, Dupré C, Jourdan G, Marcoux C, Ollier E, Purcell S T and Duraffourg L 2011 Piezoresistance of top-down suspended Si nanowires Nanotechnology 22 395701
21. Colinge J et al 2010 Nanowire transistors without junctions Nature Nanotechnol. 5 225-9
22. Postma H W C, Kozinsky I, Husain A and Roukes M L 2005 Dynamic range of nanotube- and nanowire-based electromechanical systems Appl. Phys. Lett. 86 223105 (Pubitemid 40861620)
23. Duarte J P, Choi S, Moon D and Choi Y 2011 Simple analytical bulk current model for long-channel double-gate junctionless transistors IEEE Electron Device Lett. 32 704-6
24. Colinge J 1990 Conduction mechanisms in thin-film accumulation-mode SOI p-channel MOSFETs IEEE Trans. Electron Devices 37 718-23 (Pubitemid 20699949)
25. Sallese J, Chevillon N, Lallement C, Iñiguez B and Prégaldiny F 2011 Charge-based modeling of junctionless double-gate field-effect transistors IEEE Trans. Electron Devices 58 2628-37
26. Rudenko T, Nazarov A, Ferain I, Das S, Yu R, Barraud S and Razavi P 2012 Mobility enhancement effect in heavily doped junctionless nanowire silicon-on-insulator metal-oxide-semiconductor field-effect transistors Appl. Phys. Lett. 101 213502
27. Doria R T, Trevisoli R D, Souza M De and Pavanello M A 2012 Impact of the series resistance in the I-V characteristics of junctionless nanowire transistors and its dependence on the temperature J. Integr. Circuits Syst. 7 121-9
28. Najmzadeh M, Sallese J, Berthome M, Grabinski W and Ionescu A M 2013 Mobility extraction assessment in GAA Si NW JL FETs with cross-section down to 5 nm ULIS: 2013 14th International Conf. on Ultimate Integration on Silicon pp 105-8
29. Sazonova V, Yaish Y, Ustünel H, Roundy D, Arias T A and McEuen P L 2004 A tunable carbon nanotube electromechanical oscillator Nature 431 284-7 (Pubitemid 39265658)
30. Rubiola E 2005 On the measurement of frequency and of its sample variance with high-resolution counters Rev. Sci. Instrum. 76 054703 (Pubitemid 40666061)
31. Arndt G, Dupré C, Arcamone J, Cibrario G, Rozeau O, Duraffourg L, Ollier E and Colinet E 2012 Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications ISSCC: IEEE Int. Solid-State Circuits Conf. vol 54 pp 320-2
32. Chen C, Rosenblatt S, Bolotin K I, Kalb W, Kim P, Kymissis I, Stormer H L, Heinz T F and Hone J 2009 Performance of monolayer graphene nanomechanical resonators with electrical readout Nature Nanotechnol. 4 861-7
33. Bartsch S.T., Rusu A., Ionescu A.M., Nanotechnology, 23, 22, 2012, 10.1088/0957-4484/23/22/225501 0957-4484 225501.