Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1368-1371

  Ollier, E ^a   Dupre, C ^a   Arndt, G ^a   Arcamone, J ^a   Vizioz, C ^a   Duraffourg, L ^a   Sage, E ^a   Koumela, A ^a   Hentz, S ^a   Cibrario, G ^a   Meininger, P ^a   Benotmane, K ^a   Marcoux, C ^a   Rozeau, O ^a   Billiot, G ^a   Colinet, E ^a   Andrieu, F ^a   Philippe, J ^a   Aussenac, F ^a   Mercier, D ^a   Blanc, H ^a   Ernst, T ^a   Robert, P ^a   more..

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COINTEGRATION; FREQUENCY RANGES; HIGH FREQUENCY HF; HIGH SENSITIVITY; MONOLITHIC INTEGRATION; PORTABLE SYSTEM; SENSING APPLICATIONS; SINGLE-CRYSTAL SI;

MONOLITHIC INTEGRATED CIRCUITS; RESONATORS; SIGNAL PROCESSING; SILICON;

MEMS;

EID: 84860451942     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170421     Document Type: Conference Paper

References (8)

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2. E. Mile et al., "In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection", Nanotechnology 21, pp. 165-504, 2010.
3. J. Arcamone et al., "VLSI silicon multi-gaz analyzer coupling gaz chromatography and NEMS detectors", IEEE-IEDM 11 Conference, Washington US, December 2011
4. E. Colinet, et al., "Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process," J. Solid State Circuits, vol. 44, pp. 247-257, January 2009.
5. J. Verd et al. "Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications", EDL, vol. 27, pp. 495-497, June 2006.
6. J. Arcamone et al., "A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators", IEEE Transactions on, vol. 54, pp.377-381, May 2007
7. E. Ollier et al, "Active NEMS combining a Single Crystal Silicon mechanical structure and an embedded MOSFET transistor for sensing", MNE10 Conference, Genoa Italy, September 2010
8. G. Arndt et al., "Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications", accepted at ISSCC12 Conference, San Francisco US, February 2012