Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 55, Issue , 2012, Pages 320-321

  Arndt, Gregory ^a   Dupré, Cecilia ^a   Arcamone, Julien ^a   Cibrario, Gérald ^a   Rozeau, Olivier ^a   Duraffourg, Laurent ^a   Ollier, Eric ^a   Colinet, Eric ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE PIXEL; BIOCHEMICAL REACTIONS; BIOLOGICAL PHENOMENA; CMOS FABRICATION; DETECTION SENSITIVITY; FAST RESPONSE TIME; LAB EQUIPMENTS; LIVING CELL; NANO ELECTROMECHANICAL SYSTEMS; NANO SCALE; RESONANT SENSORS; SENSING APPLICATIONS; SINGLE MOLECULE; SUBMICRON DIMENSION; VLSI PROCESS;

MASS SPECTROMETRY; MEMS;

ELECTROMECHANICAL DEVICES;

EID: 84860682069     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2012.6177005     Document Type: Conference Paper

References (6)

1. E. Colinet, et al., "Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process," IEEE J. Solid State Circuits, vol. 44, pp. 247-257, Jan. 2009.
2. J. Arcamone, et al., "VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors," accepted at the IEEE IEDM 2011 conference.
3. E. Ollier, et al., "Ultra-scaled high frequency single-crystal Si NEMS resonators and their Front-End co-integration with CMOS for high sensitivity applications,"accepted at the IEEE MEMS 2012 conference.
4. G. Arndt, et al., "A design methodology for fully integrated MEMS and NEMS Pierce oscillators," Sensors and Actuators A: Physical, In Press, Corrected Proof, 2011.
5. J. Verd, et al., "Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications," IEEE Electron Device Letters, vol. 27, pp. 495-497, June 2006.
6. J. Arcamone, et al., "A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators," IEEE Trans. Circuits and Systems II: Express Briefs, vol. 54, pp. 377-381, May 2007.