Large-scale integration of nanoelectromechanical systems for gas sensing applications

Nano Letters

Volumn 12, Issue 3, 2012, Pages 1269-1274

  Bargatin, I ^a,b,c   Myers, E B ^a   Aldridge, J S ^a,d   Marcoux, C ^b   Brianceau, P ^b   Duraffourg, L ^b   Colinet, E ^b   Hentz, S ^b   Andreucci, P ^b   Roukes, M L ^a  

^a Kavli Nanoscience Institute   (United States)

^b CEA LETI   (France)

^c Stanford University   (United States)

^d Integrated Photonics Technology Inc   (United States)

Author keywords

gas chromatography; gas detectors; mass sensing; NEMS arrays

Indexed keywords

CHEMICAL VAPOR SENSORS; EXCESSIVE HEATING; EXPOSURE PERIOD; GAS SENSING APPLICATIONS; MASS SENSING; NANOMECHANICAL SYSTEMS; NANORESONATORS; NEMS DEVICES; RESONANCE RESPONSE; SERIES-PARALLEL;

CHEMICAL WARFARE; GAS CHROMATOGRAPHY; GAS DETECTORS;

NEMS;

ARTICLE; EQUIPMENT; EQUIPMENT DESIGN; GAS; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; SYSTEM ANALYSIS; TRANSDUCER;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GASES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANOTECHNOLOGY; SYSTEMS INTEGRATION; TRANSDUCERS;

EID: 84858216435     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl2037479     Document Type: Article

References (23)

1. Rugar, D.; Budakian, R.; Mamin, H. J.; Chui, B. W. Nature 2004, 430, 329-332
2. LaHaye, M. D.; Buu, O.; Camarota, B.; Schwab, K. C. Science 2004, 304, 74-77
3. Naik, A. K.; Hanay, M. S.; Hiebert, W. K.; Feng, X. L.; Roukes, M. L. Nat. Nanotechnol. 2009, 4, 445-450
4. Jensen, K.; Kim, K.; Zettle, A. Nat. Nanotechnol. 2008, 9, 533-537
5. Li, M.; Tang, H. X.; Roukes, M. L. Nat. Nanotechnol. 2007, 2, 114-120
6. Arlett, J.; Myers, E. B.; Roukes, M. L. Nat. Nanotechnol. 2007, 6, 203-15
7. Zhang, Z.; Lang, H. P.; Huber, F.; Bietsch, A.; Grange, W.; Certa, U.; McKendry, R.; Gunterodt, H.-J.; Hegner, M.; Gerber, Ch. Nat. Nanotechnol. 2006, 1, 214-220
8. Lee, H. J.; Park, K. K.; Kupnik, M.; Oralkan, Ö.; Khuri-Yakub, B. T. Proc. IEEE Sensors Conf. 2010, 2122-2126
9. Li, M.; Myers, E. B.; Tang, H. X.; Aldridge, S. J.; McCaig, H. C.; Whiting, J. J.; Simonson, R. J.; Lewis, N. S.; Roukes, M. L. Nano Lett. 2010, 10, 3899-3903
10. Sampathkumar, A.; Ekinci, K. L.; Murray, T. W. Nano Lett. 2011, 11, 1014-1019
11. Li, M.; Bhiladvala, R. B.; Morrow, T. J.; Sioss, J. A.; Lew, K.-K.; Redwing, J. M.; Keating, C. D.; Mayer, T. S. Nat. Nanotechnol. 2008, 3, 88-92
12. Li, S.-S.; Lin, Y.-W.; Ren, Z.; Nguyen, C.T.-C. Disk-array design for suppression of unwanted modes in micromechanical composite-array filters. In Tech. Digest, 19th IEEE Int. Conf. on MicroElectroMechanical Systems (MEMS'06), Istanbul, Turkey, Jan. 22-26, 2006.
13. Li, S.-S.; Lin, Y.-W.; Ren, Z.; Nguyen, C.T.-C., An MSI micromechanical differential disk-array filter. In Digest of Tech. Papers, 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers'07), Lyon, France, June 11-14, 2007.
14. Andreucci, P.; Duraffourg, L.; Marcoux, C.; Brianceau, P.; Hentz, S.; Minoret, S.; Myers, E.; Roukes, M. NEMS comprising AlSi alloy based transduction means. Patent PCT/EP201000060033.
15. Bargatin, I.; Kozinsky, I.; Roukes, M. L. Appl. Phys. Lett. 2007, 90, 093116
16. Bargatin, I.; Myers, E. B.; Arlett, J.; Gudlewski, B.; Roukes, M. L. App. Phys. Lett. 2005, 86, 133109
17. Cleland, A. N.; Roukes, M. L. J. App. Phys. 2002, 92, 2758-2769
18. Sader, J. E. J. Appl. Phys. 1998, 84, 64-76
19. Van Eysden, C. A.; Sader, J. E. J. Appl. Phys. 2007, 101, 044908
20. Ekinci, K. L.; Yang, Y. T.; Huang, X. M. H.; Roukes, M. L. Appl. Phys. Lett. 2002, 81, 2253-2255
21. Masmanidis, S. C.; Karabalin, R. B.; de Vlaminck, I.; Borghs, G.; Freeman, M. R.; Roukes, M. L. Science 2007, 317, 780-783
22. Lewis, P. R.; Manginell, R. P.; Adkins, D. R.; Kottenstette, R. J.; Wheeler, D. R.; Sokolowski, S. S.; Trudell, D. E.; Byrnes, J. E.; Okandan, M.; Bauer, J. M.; Manley, R. G.; Frye-Mason, G. C. IEEE Sens. J. 2006, 6, 784-795
23. Grate, J. W.; Kaganove, S. N.; Patrash, S. J.; Craig, R.; Bliss, M. Chem. Mater. 1997, 9, 1201-1207