Resonant-body silicon nanowire field effect transistor without junctions

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2012, Pages

  Bartsch, Sebastian T ^a   Dupre, Cecilia ^b   Ollier, Eric ^b   Ionescu, Adrian M ^a  

^a EPFL   (Switzerland)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE MODULATION; ELECTROMECHANICAL RESONATORS; FUNDAMENTAL RESONANCE FREQUENCY; MECHANICAL MOTIONS; SENSING PLATFORMS; SILICON NANOWIRE FIELD-EFFECT TRANSISTORS; SILICON NANOWIRES; WAFER TECHNOLOGY;

ELECTROMECHANICAL DEVICES; ELECTRON DEVICES; NANOWIRES; SILICON;

SILICON WAFERS;

EID: 84876157056     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2012.6479046     Document Type: Conference Paper

References (9)

1. Hanay, M.S. et al., Single-protein nanomechanical mass spectrometry in real time, Nat. Nanotechnol., in press, 2012.
2. Feng, X.L., He, R.R., Yang, P.D. Roukes, M.L. Very high frequency silicon nanowire electromechanical resonators. Nano Lett 7, 1953-1959, 2007.
3. Bartsch, S. T., Lovera, A., Grogg, D., Ionescu, A. M. Silicon nanomechanical resonators with intrinsic tunable gain and sub-nW power consumption. Nano 84, 1771-1773, 2004.
4. Colinge, J.P., Lee, C.W., Afzalian, A., Akhavan, N.D., Yan, R. et al. Nanowire transistors without junctions. Nat. Nanotechnol. 5, 225-229, 2010.
5. Grogg, D., Ionescu, A.M. The vibrating body transistor. IEEE-T Electron Dev 58, 2113-2121, 2011.
6. Abele, N., Fritschi, R., Boucart, K., Casset, F., Ancey, P. et al. Suspended-gate MOSFET: Bringing new MEMS functionality into solid-state MOS transistor. International Electron Device Meeting IEDM, 1075-1077, 2005.
7. Weinstein, D. Bhave, S.A. The resonant body transistor. Nano Lett 10, 1234-1237, 2010.
8. Ollier, E. et al., Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , art. no. 6170421 , pp. 1368-1371, 2012.
9. Bartsch, S.T., Rusu, A., Ionescu, A.M. Single Active Nanoelectromechanical Tuning Fork as Front-end Radio-frequency Receiver, Nanotechnology 23, 225501, 2012.