Superfilling damascene trenches with gold in a sulfite electrolyte

Journal of the Electrochemical Society

Volumn 160, Issue 12, 2013, Pages

  Josell, D ^a   Moffat, T P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION KINETICS; BUMP FORMATION; CONCAVE SURFACE; DEPOSITION REACTIONS; FILLED TRENCH; POSITIVE VALUE; SUPERFILLING; VOID-FREE;

CATALYSTS; DEPOSITION; ELECTROLYTES; LEAD; SODIUM;

GOLD DEPOSITS;

EID: 84884310995     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/2.003312jes     Document Type: Article

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