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Volumn 159, Issue 11, 2012, Pages

Superfilling of Cu-Ag using electrodeposition in cyanide-based electrolyte

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION EFFECTS; CONCENTRATION RANGES; DEFECT-FREE; SUPERFILLING;

EID: 84875623197     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/2.051211jes     Document Type: Article
Times cited : (22)

References (15)
  • 1
    • 0004245602 scopus 로고    scopus 로고
    • Interconnection, ITRS (International Technology Roadmap for Semiconductors, online document), 2009 edition
    • Interconnection, ITRS (International Technology Roadmap for Semiconductors, online document), 2009 edition, International Technology for Semiconductors (2009).
    • (2009) International Technology for Semiconductors


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.