Motion control of piezoelectric positioning stages: Modeling, controller design, and experimental evaluation

IEEE/ASME Transactions on Mechatronics

Volumn 18, Issue 5, 2013, Pages 1459-1471

  Gu, Guo Ying ^a   Zhu, Li Min ^a   Su, Chun Yi ^b,c   Ding, Han ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^c Dept of Electrical and Computer Engineering   (Canada)

Author keywords

Electromechanical model; hysteresis; motion control; piezoelectric positioning stage; robust control

Indexed keywords

ELECTROMECHANICAL MODELS; EXPERIMENTAL EVALUATION; HYSTERESIS NON LINEARITIES; MOTION TRAJECTORIES; PARAMETER UNCERTAINTY; POSITIONING STAGE; ROBUST ADAPTIVE CONTROLLER; TRACKING PERFORMANCE;

FREQUENCY RESPONSE; MOTION CONTROL; PIEZOELECTRICITY; ROBUST CONTROL;

HYSTERESIS;

EID: 84880573486     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2012.2203315     Document Type: Article

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