Precision tracking control of a piezoelectric-actuated system

Precision Engineering

Volumn 32, Issue 2, 2008, Pages 71-78

  Shen, Jing Chung ^a   Jywe, Wen Yuh ^a   Chiang, Huan Keng ^b   Shu, Yu Ling ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Nano positioning; Piezoelectric actuator; Sliding mode control; Tracking control

Indexed keywords

CONTROL NONLINEARITIES; ELECTRONIC CIRCUIT TRACKING; ENGINEERING; HYSTERESIS; MATHEMATICAL MODELS; MOTION CONTROL; SLIDING MODE CONTROL; UNCERTAINTY ANALYSIS;

MODIFIED PRANDTL ISHLINSKII (MPI) MODELS; NANOPOSITIONING; TRACKING CONTROL;

PIEZOELECTRIC ACTUATORS;

EID: 39049119825     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.04.002     Document Type: Article

References (16)

1. Cruz-Hernandez J., and Hayward V. Phase control approach to hysteresis reduction. IEEE Trans Control Syst Technol 9 (2001) 17-26
2. Ge P., and Jouaneh M. Tracking control of a piezoceramic actuator. IEEE Trans Control Syst Technol 4 (1996) 209-216
3. Ge P., and Jouaneh M. Generalized Preisach model for hysteresis nonlinearity of piezoceramic actuators. Prec Eng 20 (1997) 99-111
4. Huang Y.C., and Lin D.Y. Ultra-fine tracking control on piezoelectric actuated motion stage using piezoelectric hysteretic model. Asian J Control 6 (2004) 208-216
5. Hwang C.L., and Jan C. A reinforcement discrete neuro-adaptive control for unknown piezoelectric actuator systems with dominant hysteresis. IEEE Trans Neural Networks 14 (2003) 66-78
6. Hwang C.L., Jan C., and Chen Y.H. Piezomechanics using intelligent variable-structure control. IEEE Trans Ind Electron 48 (2001) 47-59
7. Ku S.S., Pinsopon U., Cetinkunt S., and Nakajima S. Design, fabrication, and real-time neural network control of a three degrees of freedom nanopositioner. IEEE/ASME Trans Mechatron 5 (2000) 273-280
8. ∞ control and sliding mode control of magnetic levitation system. Asian J Control 4 (2002) 333-340
9. Tao Q., and Kokotovic P.V. Adaptive control of plants with unknown hysteresis. IEEE Trans Autom Control 40 (1995) 200-212
10. Utkin V., Guldner J., and Shi J. Sliding mode control in electromechanical systems (1999), Taylor & Francis, Padstow
11. Xu J.H. Neural network control of a piezo tool positioner. Proceedings of the Canadian conference on electrical and computer engineering (1993) 333-336
12. Shen J.C., Jywe W.Y., Liu C.H., Jian Y.T., and Deng Y.F. Integral sliding-mode control of a piezoelectric-actuated motion stage. Proceedings of the 16th IFAC World Congress (2005)
13. Kuhnen K., and Janocha H. Complex hysteresis modeling of a broad class of hysteretic actuator nonlinearities. Proceedings of the 8th international conference on new actuators (2002) 688-691
14. Kuhnen K. Modeling, identification and compensation of complex hysteretic nonlinearities: a modified Prandtl-Ishlinskii approach. Eur J Control 9 4 (2003) 407-417
15. Ang W.T., Garmon F.A., Khosla P.K., and Riviere C.N. Modeling rate-dependent hysteresis in piezoelectric actuators. Proceedings of the 2003 IEEE/RES Int. Conference on intelligent robots and systems (20031975-80)
16. Kuhnen K. Modeling, identification and compensation of complex hysteretic nonlinearities and log(t)-type creep dynamics. Control Intell Syst 33 2 (2005) 134-147