Adaptive robust precision motion control of a piezoelectric positioning stage

IEEE Transactions on Control Systems Technology

Volumn 16, Issue 5, 2008, Pages 1039-1046

  Zhong, Jinghua ^a   Yao, Bin ^a,b  

^a PURDUE UNIVERSITY   (United States)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Adaptive control; Hysteresis; Motion control; Piezoelectric actuators; Robust control

Indexed keywords

CONTROL THEORY; DYNAMICS; ELASTICITY; HYSTERESIS; LINEAR CONTROL SYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC DEVICES; RATE CONSTANTS; ROBUST CONTROL; STAGES; TRAJECTORIES;

ADAPTIVE CONTROL; ADAPTIVE ROBUST CONTROL; ADAPTIVE ROBUST PRECISION MOTION CONTROL; BOUNDED DISTURBANCES; BROAD SPECTRUM; CONTROL-ORIENTED MODELING; DOMAIN SWITCHING; DYNAMIC MOTIONS; FIRST ORDERS; FREQUENCY RANGING; HYSTERESIS NON-LINEARITY; INTELLIGENT INTEGRATION; LINEAR CONTROLLERS; MODEL COMPENSATION; MODEL PARAMETERS; MOTION CONTROL; NON-LINEAR MODELING; ON-LINE ADAPTATION; PHASE LAGS; PIEZO-ELECTRIC EFFECTS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC STACK ACTUATORS; POSITIONING STAGE; ROBUST CONTROLLERS; SENSOR NOISES; SINUSOIDAL TRAJECTORIES; SLOW DYNAMICS; TRACKING ACCURACY; TRACKING CONTROLS; TRACKING ERRORS; UNKNOWN PARAMETERS;

PIEZOELECTRICITY;

EID: 49249130723     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.916319     Document Type: Article

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