Modeling piezoelectric actuators

IEEE/ASME Transactions on Mechatronics

Volumn 5, Issue 4, 2000, Pages 331-341

  Adriaens, Han J M T A ^a,b   De Koning, Willem L ^a   Banning, Reinder ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM SYNTHESIS; DAMPING; DISTRIBUTED PARAMETER CONTROL SYSTEMS; DYNAMICS; EIGENVALUES AND EIGENFUNCTIONS; ELECTROMECHANICAL DEVICES; HYSTERESIS; MATHEMATICAL MODELS; PARTIAL DIFFERENTIAL EQUATIONS; PIEZOELECTRIC DEVICES; SPRINGS (COMPONENTS);

CHARGE STEERING; PIEZOELECTRIC ACTUATOR; VOLTAGE STEERING;

ACTUATORS;

EID: 0034479026     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/3516.891044     Document Type: Article

References (23)

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