Displacement control of piezoelectric actuators using current and voltage

IEEE/ASME Transactions on Mechatronics

Volumn 16, Issue 1, 2011, Pages 160-166

  Ronkanen, Pekka ^a   Kallio, Pasi ^a   Vilkko, Matti ^a   Koivo, Heikki N ^b  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Charge control; current control; piezoelectric actuator

Indexed keywords

ACTUATOR MODEL; CHARGE CONTROL; CURRENT CONTROL; CURRENT DRIVERS; CURRENT FED; CURRENT METERS; DISPLACEMENT CONTROL; FEED-FORWARD; INDIVIDUAL MODELS; MOTION HISTORY; MOTION PHASE; MOTION RANGE; OPEN-LOOP VOLTAGE; PIEZO-ACTUATORS; SENSORLESS CONTROL SCHEME; STATIC PHASE; VARIABLE VELOCITIES; VOLTAGE AMPLIFIERS;

CANTILEVER BEAMS; ELECTRIC CURRENT CONTROL; ELECTRIC POTENTIAL; HYSTERESIS; PIEZOELECTRICITY; VOLTAGE REGULATORS;

PIEZOELECTRIC ACTUATORS;

EID: 78651354782     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2037914     Document Type: Article

References (15)

1. P. Ge and M. Jouaneh, "Tracking control of a piezoceramic actuator," IEEE Trans. Control Syst. Technol., vol. 4, no. 3, pp. 209-216, May 1996.
2. D. Croft, G. Shedd, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application," Trans. ASME, J. Dyn. Syst. Meas. Control, vol. 123, pp. 35-43, 2001.
3. G. S. Choi, H.-S. Kim, and G. H. Choi, "A study on position control of piezoelectric actuators," in Proc. IEEE Int. Symp. Ind. Electron., Guimaraes, Portugal, Jul. 1997, pp. 851-855.
4. L. Chuntao and T. Yonghong, "A neural networks model for hysteresis nonlinearity," Sens. Actuators A, Phys., vol. 112, pp. 49-54, 2004.
5. C. V. Newcomb and I. Flinn, "Improving the linearity of piezoelectric ceramic actuators," Electron. Lett., vol. 18, no. 11, pp. 442-444, May 1982.
6. P. Ronkanen, P. Kallio, and H. N. Koivo, "Current control of piezoelectric actuators with power loss compensation," in Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS), Lausanne, Switzerland, Oct. 2002, pp. 1948- 1953.
7. P. Ronkanen, P. Kallio, Q. Zhou, and H. N. Koivo, "Current control of piezoelectric actuators with environmental compensation," in Proc.Micro. Technol. 2003, 2nd VDE World Microtechnol. Congr., Munich, Germany, Oct. 2003, pp. 323-328.
8. R. H. Comstock, "Charge control of piezoelectric actuators to reduce hysteresis effects," U.S. Patent 4 263 527, 1981.
9. R. Perez, J. Agnus, J.-M. Breguet, N. Chaillet, H. Bleuler, and R. Clavel, "Characterisation and control of a 1 DOF monolithic piezoactuator (MPA)," in Proc. SPIE Microrobot. Microassembly III, Boston, MA, vol. 4568, Oct. 2001, pp. 151-161.
10. K. Furutani, M. Urushibata, and N. Mohri, "Improvement of control method for piezoelectric actuator by combining induced charge feedback with inverse transfer function compensation," in Proc. 1998 IEEE Int. Conf. Robot. Autom., Leuven, Belgium, May 1998, pp. 1504-1509.
11. K. Abidi and A. Sabanovic, "Sliding-mode control for high-precision motion of a piezostage," IEEE Trans. Ind. Electron., vol. 54, no. 1, pp. 629-637, Feb. 2007.
12. J. S. R. Jang, C. T. Sun, and E. Mizutani, Neuro-Fuzzy and Soft Computing: A Computational Approach to Learning and Machine Intelligence. Englewood Cliffs, NJ: Prentice-Hall, 1997.
13. M. Guan and W.-H. Liao, "Studies on the circuit models of piezoelectric ceramics," in Proc. 2004 Int. Conf. Inf. Acquis., Heifei, China, Jun. 2004, pp. 26-31.
14. P. Kallio and J. Kuncov́a-Kallio, "Capillary pressure microinjection of living adherent cells: Challenges in automation," J. Micromechatron., vol. 3, pp. 189-220, 2006.
15. P. Ronkanen, P. Kallio, and H. Koivo, "Simultaneous actuation and force estimation using piezoelectric actuators," in Proc. 2007 IEEE Int. Conf. Mechatron. Autom. (ICMA), Harbin, China, Aug. 2007, pp. 3261-3265.